Frequency tunable device
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United States of America Patent
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May 22, 2007
Grant Date -
Sep 29, 2005
app pub date -
Nov 5, 2004
filing date -
Mar 24, 2004
priority date (Note) -
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Abstract
A frequency tunable device includes a substrate, and a capacitor structure supported by the substrate and including a ferroelectric film and first and second electrodes. The ferroelectric film has two opposite sides, and is made from a ferroelectric material having a formula of Pb.sub.1-xBa.sub.xZrO.sub.3, where x is a positive number greater than 0.3 and less than 0.6. The first and second electrodes are respectively formed on the sides of the ferroelectric film. The dielectric constant of the ferroelectric film varies with a voltage applied to the first and second electrodes.
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