Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
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United States of America Patent
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May 22, 2007
Grant Date -
Aug 18, 2005
app pub date -
Apr 15, 2005
filing date -
Feb 27, 2003
priority date (Note) -
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Abstract
A radial transverse electric polarizer device is provided. The device includes a first layer of material having a first refractive index, a second layer of material having a second refractive index, and a plurality of elongated elements azimuthally and periodically spaced apart, and disposed between the first layer and the second layer. The plurality of elongated elements interact with electromagnetic waves of radiation to transmit transverse electric polarization of electromagnetic waves of radiation. One aspect of the invention is, for example, to use such polarizer device in a lithographic projection apparatus to increase imaging resolution. Another aspect is to provide a device manufacturing method including polarizing a beam of radiation in a transverse electric polarization.
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