Methods of depositing piezoelectric films

United States of America Patent

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Jun 5, 2007
Grant Date
Oct 14, 2004
app pub date
Apr 6, 2004
filing date
Apr 10, 2003

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Abstract

This invention relates to methods of depositing piezoelectric films such as in part of a stack including depositing a piezoelectric layer, measuring the thickness of the layer and depositing a further film or films such that the combined thickness is substantially equal to the target thickness.

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Patent Owner	Address
AVIZA TECHNOLOGY LIMITED	RINGLAND WAY NEWPORT SOUTH WALES NP18 2TA

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Ford, Mark Ashley	Bristol, GB	2	20
Rich, Paul	Wooton-Under-Edge, GB	19	77

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Methods of depositing piezoelectric films

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United States of America Patent

10817888

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PATENT NO	7227292
APP PUB NO	20040200049A1
SERIAL NO	10817888
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 05, 2007	US,7227292,B2 US7227292B2	GRANTED PATENT AS SECOND PUBLICATION
October 14, 2004	US,20040200049,A1 US20040200049A1	FIRST PUBLISHED PATENT APPLICATION

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10817888

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