Tempering method for a screw-type vacuum pump

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United States of America Patent

PATENT NO 7232295
APP PUB NO 20050019169A1
SERIAL NO

10495834

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Abstract

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A screw-type vacuum pump (1) is tempered such that characteristics of the pump are not substantially altered when the pump is subjected to thermal stress. In order to achieve said aim, cooling is adjusted according to an operating state of the screw-type vacuum pump (1), preferably to maintain a substantially constant pump gap (4).

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Patent Owner(s)

Patent OwnerAddress
LEYBOLD VAKUUM GMBH50968 KÖLN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Behling, Manfred Koln, DE 4 22
Kriehn, Hartmut Koln, DE 14 103
Rofall, Klaus Rosrath, DE 5 23

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