Method and apparatus for a reflective spatial light modulator with a flexible pedestal
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United States of America Patent
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Jun 19, 2007
Grant Date -
Aug 24, 2006
app pub date -
Apr 26, 2006
filing date -
Jul 28, 2004
priority date (Note) -
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Abstract
An electro-mechanical system comprising a substrate including a surface region and a flexible member coupled at a first end to the surface region. The system further comprises a base region and a tip region. The system also comprises a reflective member coupled to the flexible member, including a reflective surface and a backside region, the backside region being coupled to the second end of the flexible member, the reflective surface being substantially parallel to the surface region while the reflective member is in a first state and being substantially non-parallel to the surface region while the reflective member is in a second state. The flexible member moves from a first position characterized by the first state to a second position characterized by the second state and the angle between the first state and the second state is greater than 12.degree..
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