Digital optical switch apparatus and process for manufacturing same
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United States of America Patent
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Jun 26, 2007
Grant Date -
Jun 26, 2003
app pub date -
Oct 18, 2002
filing date -
Oct 19, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides a digital optical switch apparatus and process for manufacturing the apparatus. The apparatus includes a mirror assembly coupled to a top cap and to a bottom cap. The top and bottom caps each include one or more electrodes that, when energized with electrical energy, move a mirrored surface to one of a plurality of discrete positions. Mirror assemblies can be cascaded to create a packaged assembly having any multiple of discrete positions. The process includes planar micro-machining techniques to create isolated islands for electrical feed through. The process enables mechanical bonding of multiple tiers via a single bond region and through a bond-pad window.
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