Condenser optic with sacrificial reflective surface
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United States of America Patent
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Jul 3, 2007
Grant Date -
Nov 2, 2006
app pub date -
Jun 30, 2006
filing date -
Jan 16, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Employing collector optics that has a sacrificial reflective surface can significantly prolong the useful life of the collector optics and the overall performance of the condenser in which the collector optics are incorporated. The collector optics is normally subject to erosion by debris from laser plasma source of radiation. The presence of an upper sacrificial reflective surface over the underlying reflective surface effectively increases the life of the optics while relaxing the constraints on the radiation source. Spatial and temporally varying reflectivity that results from the use of the sacrificial reflective surface can be accommodated by proper condenser design.
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