Method and apparatus for high resolution coherent optical imaging
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United States of America Patent
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Jul 10, 2007
Grant Date -
Apr 22, 2004
app pub date -
Jul 10, 2001
filing date -
Jul 10, 2000
priority date (Note) -
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Abstract
A method and an apparatus for examining the subsurface microstructure of a sample are provided. Radiation from a plurality of optical radiation sources travels along a first optical path. In the first optical path, a device focuses the optical radiati n from each of the optical sources into a plurality of respective focal points along the first optical path to provide substantially continuous coverage of a selected portion of the first optical path. Then, a sample on the first optical path within the selected length extending into the sample is scanned along said selected portion of the first optical path.
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