Semiconductor module with improved interposer structure and method for forming the same

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United States of America Patent

PATENT NO 7245022
APP PUB NO 20050110160A1
SERIAL NO

10721984

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Abstract

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Under the present invention, a semiconductor chip is electrically connected to a substrate (e.g., organic, ceramic, etc.) by an interposer structure. The interposer structure comprises an elastomeric, compliant material that includes metallurgic through connections having a predetermined shape. In a typical embodiment, the metallurgical through connections electrically connect an under bump metallization of the semiconductor chip to a top surface metallization of the substrate. By utilizing the interposer structure in accordance with the present invention, the problems associated with previous semiconductor module designs are alleviated.

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Patent Owner(s)

Patent OwnerAddress
ULTRATECH INC3050 ZANKER ROAD SAN JOSE CA 95134

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Farooq, Mukta G Hopewell Junction, NY 212 3727
Knickerbocker, John U Wappingers Falls, NY 263 4114
Pompeo, Frank L Redding, CT 47 922
Shinde, Subhash L Cortlandt Manor, NY 45 479

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