Monolithic vertical integration of an acoustic resonator and electronic circuitry
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United States of America Patent
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Jul 24, 2007
Grant Date -
Sep 14, 2006
app pub date -
Mar 14, 2005
filing date -
Mar 14, 2005
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Monolithic devices that include an acoustic resonator vertically integrated with electronic circuitry are described. In one aspect, a monolithic integrated device includes a substrate, electronic circuitry supported by the substrate, an acoustic isolator over the electronic circuitry, and an acoustic resonator on the acoustic isolator. A method of fabricating the monolithic device also is described.
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