US Patent No: 7,250,626

Number of patents in Portfolio can not be more than 2000

Probe testing structure

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ALSO PUBLISHED AS: 20050088191
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

A calibration structure for probing devices.

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First Claim

Related Publications

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CASCADE MICROTECH, INC.BEAVERTON, OR254

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lesher, Timothy E Portland, OR 3 5

Cited Art

Patent Info (Count) # Cites Year
 
CASCADE MICROTECH, INC. (59)
4,280,112 Electrical coupler 97 1979
4,697,143 Wafer probe 195 1984
4,827,211 Wafer probe 124 1987
4,858,160 System for setting reference reactance for vector corrected measurements 99 1988
4,849,689 Microwave wafer probe having replaceable probe tip 124 1988
4,994,737 System for facilitating planar probe measurements of high-speed interconnect structures 57 1990
5,045,781 High-frequency active probe having replaceable contact needles 108 1991
5,101,453 Fiber optic wafer probe 97 1991
5,237,267 Wafer probe station having auxiliary chucks 52 1992
5,266,889 Wafer probe station with integrated environment control enclosure 132 1992
5,345,170 Wafer probe station having integrated guarding, Kelvin connection and shielding systems 115 1992
5,457,398 Wafer probe station having full guarding 121 1993
5,434,512 Wafer probe station having integrated guarding, Kelvin connection and shielding systems 59 1994
5,506,515 High-frequency probe tip assembly 148 1994
5,532,609 Wafer probe station having environment control enclosure 70 1995
5,561,377 System for evaluating probing networks 63 1995
5,610,529 Probe station having conductive coating added to thermal chuck insulator 134 1995
5,565,788 Coaxial wafer probe with tip shielding 143 1995
5,663,653 Wafer probe station for low-current measurements 71 1995
5,729,150 Low-current probe card with reduced triboelectric current generating cables 135 1995
5,604,444 Wafer probe station having environment control enclosure 60 1996
5,659,255 Method of evaluating signal conditions in a probe measurement network having a plurality of separate measurement channels 58 1996
6,313,649 Wafer probe station having environment control enclosure 55 1997
6,232,788 Wafer probe station for low-current measurements 86 1997
6,232,789 Probe holder for low current measurements 87 1997
5,869,975 System for evaluating probing networks that have multiple probing ends 56 1997
5,963,027 Probe station having environment control chambers with orthogonally flexible lateral wall assembly 68 1997
6,002,263 Probe station having inner and outer shielding 59 1997
6,034,533 Low-current pogo probe card 105 1997
6,137,302 Low-current probe card with reduced triboelectric current generating cables 106 1997
5,973,505 System for evaluating probing networks 54 1998
6,445,202 Probe station thermal chuck with shielding for capacitive current 50 1999
6,252,392 Probe station having environment control chamber with bendably extensible and retractable lateral wall assembly 51 1999
6,130,544 System for evaluating probing networks 51 1999
6,288,557 Probe station having inner and outer shielding 51 1999
6,483,336 Indexing rotatable chuck for a probe station 52 2000
6,608,496 Reference transmission line junction for probing device 56 2000
6,335,628 Wafer probe station for low-current measurements 52 2001
6,380,751 Wafer probe station having environment control enclosure 49 2001
6,362,636 Probe station having multiple enclosures 53 2001
6,549,106 Waveguide with adjustable backshort 108 2001
6,492,822 Wafer probe station for low-current measurements 50 2001
6,489,789 Probe station having multiple enclosures 50 2001
6,486,687 Wafer probe station having environment control enclosure 50 2002
6,771,090 Indexing rotatable chuck for a probe station 53 2002
6,836,135 Optical testing device 48 2002
6,636,059 Wafer probe station having environment control enclosure 49 2002
6,639,415 Probe station having multiple enclosures 49 2002
6,720,782 Wafer probe station for low-current measurements 47 2002
6,777,964 Probe station 52 2002
6,724,205 Probe for combined signals 96 2002
6,642,732 Probe station thermal chuck with shielding for capacitive current 47 2002
6,861,856 Guarded tub enclosure 50 2002
6,801,047 Wafer probe station having environment control enclosure 47 2003
6,842,024 Probe station having multiple enclosures 47 2003
6,847,219 Probe station with low noise characteristics 59 2003
6,806,724 Probe for combined signals 93 2003
6,885,197 Indexing rotatable chuck for a probe station 47 2004
7,009,383 Wafer probe station having environment control enclosure 91 2004
 
TOKYO ELECTRON LIMITED (25)
4,884,026 Electrical characteristic measuring apparatus 72 1988
5,084,671 Electric probing-test machine having a cooling system 172 1990
5,198,752 Electric probing-test machine having a cooling system 151 1991
5,315,237 Touch sensor unit of prober for testing electric circuit and electric circuit testing apparatus using the touch sensor unit 106 1991
5,278,494 Wafer probing test machine 92 1992
5,321,352 Probe apparatus and method of alignment for the same 130 1992
5,325,052 Probe apparatus 142 1992
5,410,259 Probing device setting a probe card parallel 135 1993
5,404,111 Probe apparatus with a swinging holder for an object of examination 111 1993
5,521,522 Probe apparatus for testing multiple integrated circuit dies 141 1993
5,550,482 Probe device 98 1994
5,777,485 Probe method and apparatus with improved probe contact 117 1996
5,640,101 Probe system and probe method 67 1996
5,828,225 Semiconductor wafer probing apparatus 71 1996
5,910,727 Electrical inspecting apparatus with ventilation system 88 1996
5,804,983 Probe apparatus with tilt correction mechanisms 147 1997
5,999,268 Apparatus for aligning a semiconductor wafer with an inspection contactor 105 1997
6,037,793 Inspecting method and apparatus for semiconductor integrated circuit 72 1998
6,124,725 Apparatus and method for testing semiconductor devices formed on a semiconductor wafer 127 1998
6,501,289 Inspection stage including a plurality of Z shafts, and inspection apparatus 83 2000
7,005,842 Probe cartridge assembly and multi-probe assembly 91 2001
7,101,797 Substrate processing device and processing method 46 2003
7,026,832 Probe mark reading device and probe mark reading method 92 2003
7,009,415 Probing method and probing apparatus 93 2004
7,023,226 Probe pins zero-point detecting method, and prober 91 2004
 
AGILENT TECHNOLOGIES, INC. (21)
4,588,970 Three section termination for an R.F. triaxial directional bridge 51 1984
4,703,433 Vector network analyzer with integral processor 86 1984
4,816,767 Vector network analyzer with integral processor 103 1986
4,771,234 Vacuum actuated test fixture 104 1986
4,906,920 Self-leveling membrane probe 201 1988
5,493,070 Measuring cable and measuring system 90 1994
5,680,039 Probe apparatus for use in both high and low frequency measurements 48 1995
5,945,836 Loaded-board, guided-probe test fixture 118 1996
5,923,177 Portable wedge probe for perusing signals on the pins of an IC 49 1997
5,903,143 Probe apparatus with RC circuit connected between ground and a guard 92 1997
6,060,888 Error correction method for reflection measurements of reciprocal devices in vector network analyzers 111 1998
6,300,775 Scattering parameter calibration system and method 126 1999
6,271,673 Probe for measuring signals 101 1999
6,643,597 Calibrating a test system using unknown standards 114 2001
6,873,167 Connection box, system, and method for evaluating a DUT board 50 2002
2004/0095,145 Method and apparatus for performing multiport through-reflect-line calibration and measurement 94 2002
2004/0199,350 System and method for determining measurement errors of a testing device 92 2003
7,025,628 Electronic probe extender 95 2003
2004/0162,689 Multiport network analyzer calibration employing reciprocity of a device 91 2004
7,005,868 Apparatus and method for canceling DC errors and noise generated by ground shield current in a probe 91 2004
7,026,834 Multiple two axis floating probe block assembly using split probe block 91 2005
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (17)
4,744,041 Method for testing DC motors 115 1985
5,001,423 Dry interface thermal chuck temperature control system for semiconductor wafer testing 130 1990
5,144,228 Probe interface assembly 85 1991
5,210,485 Probe for wafer burn-in test system 98 1991
5,334,931 Molded test probe assembly 92 1991
5,221,905 Test system with reduced test contact interface resistance 57 1992
5,546,012 Probe card assembly having a ceramic probe card 63 1994
5,530,371 Probe card assembly 66 1995
5,629,631 Interface card for a probe card assembly 86 1995
5,804,982 Miniature probe positioning actuator 103 1995
5,561,585 Electrostatic chuck with reference electrode 63 1995
6,043,667 Substrate tester location clamping, sensing, and contacting method and apparatus 74 1997
6,791,344 System for and method of testing a microelectronic device using a dual probe technique 61 2000
6,788,093 Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies 101 2002
7,007,380 TFI probe I/O wrap test method 91 2004
7,011,531 Membrane probe with anchored elements 91 2005
7,005,879 Device for probe card power bus noise reduction 91 2005
 
TEKTRONIX, INC. (8)
4,739,259 Telescoping pin probe 99 1986
4,758,785 Pressure control apparatus for use in an integrated circuit testing station 112 1986
4,673,839 Piezoelectric pressure sensing apparatus for integrated circuit testing stations 121 1986
4,783,625 Wideband high impedance card mountable probe 95 1988
4,838,802 Low inductance ground lead 49 1988
4,923,407 Adjustable low inductance probe 72 1989
5,225,796 Coplanar transmission structure having spurious mode suppression 56 1992
6,701,265 Calibration for vector network analyzer 90 2002
 
TEXAS INSTRUMENTS INCORPORATED (8)
4,888,550 Intelligent multiprobe tip 91 1983
5,103,169 Relayless interconnections in high performance signal paths 55 1989
5,070,297 Full wafer integrated circuit testing device 276 1990
5,159,752 Scanning electron microscope based parametric testing method and apparatus 117 1990
5,225,037 Method for fabrication of probe card for testing of semiconductor devices 212 1991
5,511,010 Method and apparatus of eliminating interference in an undersettled electrical signal 88 1994
6,292,760 Method and apparatus to measure non-coherent signals 91 1998
7,026,833 Multiple-chip probe and universal tester contact assemblage 93 2005
 
FREESCALE SEMICONDUCTOR, INC. (7)
4,968,931 Apparatus and method for burning in integrated circuit wafers 166 1989
5,550,480 Method and means for controlling movement of a chuck in a test apparatus 76 1994
5,617,035 Method for testing integrated devices 108 1995
5,666,063 Method and apparatus for testing an integrated circuit 105 1996
5,982,166 Method for measuring a characteristic of a semiconductor wafer using cylindrical control 106 1997
6,127,831 Method of testing a semiconductor device by automatically measuring probe tip parameters 100 1997
6,111,419 Method of processing a substrate including measuring for planarity and probing the substrate 56 1998
 
GLOBALFOUNDRIES INC. (7)
6,091,255 System and method for tasking processing modules based upon temperature 124 1998
6,608,494 Single point high resolution time resolved photoemission microscopy system and method 107 1998
6,483,327 Quadrant avalanche photodiode time-resolved detection 103 1999
6,724,928 Real-time photoemission detection system 95 2000
6,488,405 Flip chip defect analysis using liquid crystal 97 2000
6,617,862 Laser intrusive technique for locating specific integrated circuit current paths 96 2002
7,022,976 Dynamically adjustable probe tips 93 2003
 
MICRON TECHNOLOGY, INC. (6)
5,461,328 Fixture for burn-in testing of semiconductor wafers 94 1993
5,838,161 Semiconductor interconnect having test structures for evaluating electrical characteristics of the interconnect 84 1996
6,060,891 Probe card for semiconductor wafers and method and system for testing wafers 148 1997
6,774,651 Method for aligning and connecting semiconductor components to substrates 62 2000
7,026,835 Engagement probe having a grouping of projecting apexes for engaging a conductive pad 91 2002
7,009,188 Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same 95 2004
 
W. L. GORE & ASSOCIATES, INC. (6)
4,871,883 Electro-magnetic shielding 114 1987
4,859,989 Security system and signal carrying member thereof 127 1987
5,061,823 Crush-resistant coaxial transmission line 119 1990
5,107,076 Easy strip composite dielectric coaxial signal cable 117 1991
5,477,011 Low noise signal transmission cable 102 1994
7,015,708 Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts 93 2003
 
APPLIED MATERIALS, INC. (5)
5,486,975 Corrosion resistant electrostatic chuck 67 1994
5,916,689 Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect 105 1996
5,874,361 Method of processing a wafer within a reaction chamber 104 1996
6,232,787 Microstructure defect detection 151 1999
6,310,755 Electrostatic chuck having gas cavity and method 85 1999
 
SILICON VALLEY BANK (5)
4,893,914 Test station 110 1988
5,892,539 Portable emission microscope workstation for failure analysis 115 1995
6,198,299 High Resolution analytical probe station 85 1998
6,424,141 Wafer probe station 61 2000
6,744,268 High resolution analytical probe station 117 2002
 
TEMPTRONIC CORPORATION (5)
4,426,619 Electrical testing system including plastic window test chamber and method of using same 69 1981
4,491,173 Rotatable inspection table 59 1982
4,734,872 Temperature control for device under test 99 1985
4,784,213 Mixing valve air source 78 1986
4,759,712 Device for applying controlled temperature stimuli to nerve sensitive tissue 51 1986
 
ADVANTEST CORPORATION (4)
5,172,049 IC test equipment 126 1991
5,952,842 Test head cooling system 58 1997
6,257,319 IC testing apparatus 57 1999
7,020,360 Wavelength dispersion probing system 91 2002
 
ENERGY, UNITED STATES DEPARTMENT OF (4)
4,287,473 Nondestructive method for detecting defects in photodetector and solar cell devices 107 1979
4,896,109 Photoconductive circuit element reflectometer 60 1987
5,523,694 Integrated circuit failure analysis by low-energy charge-induced voltage alteration 118 1994
6,407,560 Thermally-induced voltage alteration for analysis of microelectromechanical devices 85 2000
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (4)
4,839,587 Test fixture for tab circuits and devices 124 1988
5,198,753 Integrated circuit test fixture and method 123 1990
5,198,758 Method and apparatus for complete functional testing of a complex signal path of a semiconductor chip 70 1991
7,002,133 Detecting one or more photons from their interactions with probe photons in a matter system 91 2003
 
JOHN H. BLANZ COMPANY, INC. (4)
5,097,207 Temperature stable cryogenic probe station 105 1989
5,077,523 Cryogenic probe station having movable chuck accomodating variable thickness probe cards 103 1990
5,160,883 Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support 94 1990
5,166,606 High efficiency cryogenic test station 93 1990
 
NEW WAVE RESEARCH (4)
5,611,946 Multi-wavelength laser system, probe station and laser cutter system using the same 83 1994
5,811,751 Multi-wavelength laser system, probe station and laser cutter system using the same 134 1997
6,573,702 Method and apparatus for cleaning electronic test contacts 99 1997
5,963,364 Multi-wavelength variable attenuator and half wave plate 115 1997
 
RENESAS ELECTRONICS CORPORATION (4)
6,028,435 Semiconductor device evaluation system using optical fiber 105 1997
6,160,407 Inspection method and wiring current observation method for semiconductor device and apparatus of the same 96 1998
6,686,753 Prober and apparatus for semiconductor chip analysis 53 2000
6,900,646 Probing device and manufacturing method thereof, as well as testing apparatus and manufacturing method of semiconductor with use thereof 95 2002
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE AIR FORCE (4)
4,365,109 Coaxial cable design 61 1981
4,507,602 Measurement of permittivity and permeability of microwave materials 69 1982
4,712,370 Sliding duct seal 56 1986
5,631,571 Infrared receiver wafer level probe testing 132 1996
 
CANON KABUSHIKI KAISHA (3)
4,503,335 Semiconductor printing apparatus with multiple independent temperature control 98 1982
4,786,867 Wafer prober 102 1987
5,685,232 Positioning stage device exposure apparatus and device manufacturing method utilizing the same 112 1996
 
EASTMAN KODAK COMPANY (3)
5,019,692 Thermostatic device for fuser 47 1990
5,848,500 Light-tight enclosure and joint connectors for enclosure framework 101 1997
6,624,891 Interferometric-based external measurement system and method 49 2001
 
LSI LOGIC CORPORATION (3)
6,927,079 Method for probing a semiconductor wafer 101 2000
6,605,951 Interconnector and method of connecting probes to a die for functional analysis 101 2000
7,023,225 Wafer-mounted micro-probing platform 92 2003
 
MITSUBISHI DENKI KABUSHIKI KAISHA (3)
5,010,296 Wafer prober 61 1990
5,493,236 Test analysis apparatus and analysis method for semiconductor wafer using OBIC analysis 182 1994
6,144,212 Vertical needle type probe card, method of manufacturing thereof, method of replacing defective probe needle and test method of wafer using the probe card 104 1998
 
NATIONAL SEMICONDUCTOR CORPORATION (3)
4,757,255 Environmental box for automated wafer probing 180 1986
5,101,149 Modifiable IC board 72 1989
5,883,522 Apparatus and method for retaining a semiconductor wafer during testing 105 1996
 
SONY ELECTRONICS INC. (3)
5,669,316 Turntable for rotating a wafer carrier 98 1993
6,137,303 Integrated testing method and apparatus for semiconductor test operations processing 115 1998
6,259,261 Method and apparatus for electrically testing semiconductor devices fabricated on a wafer 59 1999
 
WENTWORTH LABORATORIES, INC. (3)
5,959,461 Probe station adapter for backside emission inspection 117 1997
6,031,383 Probe station for low current, low voltage parametric measurements using multiple probes 103 1998
6,124,723 Probe holder for low voltage, low current measurements in a water probe station 79 1998
 
YOKOWO CO., LTD. (3)
6,900,647 Contact probe and probe device 102 2004
6,903,563 Contact probe and probe device 96 2004
7,015,710 Contact probe and probe device 93 2004
 
AMAZON.COM, INC. (2)
6,029,141 Internet-based customer referral system 809 1997
5,960,411 Method and system for placing a purchase order via a communications network 1086 1997
 
DAYMARC CORPORATION (2)
4,419,626 Broad band contactor assembly for testing integrated circuit devices 78 1981
4,473,798 Interface assembly for testing integrated circuit devices 72 1981
 
DCG SYSTEMS, INC. (2)
5,530,372 Method of probing a net of an IC at an optimal probe-point 115 1994
5,675,499 Optimal probe point placement 106 1996
 
EATON CORPORATION (2)
4,665,360 Docking apparatus 67 1985
4,904,935 Electrical circuit board text fixture having movable platens 111 1988
 
ELECTROGLAS, INC. (2)
6,096,567 Method and apparatus for direct probe sensing 138 1997
6,320,372 Apparatus and method for testing a substrate having a plurality of terminals 99 1999
 
HITACHI, LTD. (2)
4,383,178 System for driving rotary member in vacuum 87 1981
2005/0186,696 Gas flowmeter and manufacturing method thereof 2005
 
HP HOLDINGS THREE, INC. (2)
5,336,989 AC mains test apparatus and method 48 1991
5,995,914 Method and apparatus for asynchronously measuring frequency shifted signals 99 1996
 
HUGHES ELECTRONICS CORPORATION (2)
4,772,846 Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy 129 1986
5,583,445 Opto-electronic membrane probe 99 1994
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (2)
6,049,216 Contact type prober automatic alignment 91 1997
7,012,441 High conducting thin-film nanoprobe card and its fabrication method 102 2003
 
INTEGRATED TECHNOLOGY CORPORATION (2)
5,657,394 Integrated circuit probe card inspection system 89 1993
6,118,894 Integrated circuit probe card inspection system 113 1997
 
INTEL CORPORATION (2)
7,020,363 Optical probe for wafer testing 92 2001
6,856,129 Current probe device having an integrated amplifier 89 2002
 
KLA-TENCOR CORPORATION (2)
6,633,174 Stepper type test structures and methods for inspection of semiconductor integrated circuits 98 2000
6,771,806 Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices 125 2000
 
NGK INSULATORS, LTD. (2)
5,280,156 Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means 201 1991
6,001,760 Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck 113 1997
 
PHASE METRICS (2)
5,517,111 Automatic testing system for magnetoresistive heads 62 1995
5,668,470 Automatic testing system for magnetoresistive heads 55 1996
 
RAYTHEON COMPANY (2)
4,346,355 Radio frequency energy launcher 95 1980
5,731,708 Unpackaged semiconductor testing using an improved probe and precision X-Y table 58 1995
 
RUDOLPH TECHNOLOGIES, INC. (2)
4,918,374 Method and apparatus for inspecting integrated circuit probe cards 100 1988
6,710,798 Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card 105 1999
 
SANTA BARBARA RESEARCH CENTER (2)
4,695,794 Voltage calibration in E-beam probe using optical flooding 61 1985
4,730,158 Electron-beam probing of photodiodes 76 1986
 
SIEMENS AKTIENGESELLSCHAFT (2)
4,275,446 Method and apparatus for measurement of attenuation and distortion by a test object 100 1979
5,095,891 Connecting cable for use with a pulse generator and a shock wave generator 96 1987
 
SOLID STATE MEASUREMENTS, INC. (2)
6,900,652 Flexible membrane probe and method of use thereof 104 2003
7,023,231 Work function controlled probe for measuring properties of a semiconductor wafer and method of use thereof 92 2004
 
SV PROBE PTE LTD. (2)
5,422,574 Large scale protrusion membrane for semiconductor devices under test with very high pin counts 164 1993
6,037,785 Probe card apparatus 106 1996
 
TDK CORPORATION (2)
5,510,792 Anechoic chamber and wave absorber 92 1994
7,012,425 Eddy-current probe 93 2005
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,847,569 Electrical contact probe for sampling high frequency electrical signals 94 1996
5,802,856 Multizone bake/chill thermal cycling module 194 1997
 
TRIO-TECH INTERNATIONAL (2)
6,104,203 Test apparatus for electronic components 52 1996
6,605,955 Temperature controlled wafer chuck system with low thermal resistance 94 2000
 
ACOME, SOCIETIES ANONYME (1)
4,621,169 Electric cable construction and uses therefor 92 1985
 
ADVANCED MICRO DEVICES, INC. (1)
6,396,296 Method and apparatus for electrical characterization of an integrated circuit package using a vertical probe station 95 2000
 
ADVANCED RESEARCH AND APPLICATIONS CORPORATION (1)
4,575,676 Method and apparatus for radiation testing of electron devices 74 1983
 
AEROSPACE CORPORATION, THE (1)
6,211,663 Baseband time-domain waveform measurement method 112 1999
 
AMP INCORPORATED (1)
4,777,434 Microelectronic burn-in system 87 1987
 
ANALOG DEVICES, INC. (1)
5,712,571 Apparatus and method for detecting defects arising as a result of integrated circuit processing 56 1995
 
APEX MICROTECHNOLOGY, INC. (1)
4,871,965 Environmental testing facility for electronic components 64 1988
 
AT&T INFORMATION SYSTEMS INC. (1)
4,978,907 Apparatus and method for expanding the frequency range over which electrical signal amplitudes can be accurately measured 52 1989
 
ATG TEST SYSTEMS GMBH & CO. KG (1)
7,015,711 Apparatus and method for the testing of circuit boards, and test probe for this apparatus and this method 103 2004
 
ATG-ELECTRONICS INC. (1)
5,198,756 Test fixture wiring integrity verification device 93 1991
 
AVAGO TECHNOLOGIES ECBU IP (SINGAPORE) PTE. LTD. (1)
5,066,357 Method for making flexible circuit card with laser-contoured vias and machined capacitors 106 1990
 
BANK OF NEW ENGLAND, N.A., A NATIONAL BANKING ASSOCIATION (1)
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BARKER REVOCABLE TRUST U/A/D (1)
5,202,558 Flexible fiber optic probe for high-pressure shock experiments 101 1992
 
BELL TELEPHONE LABORATORIES, INCORPORATED (1)
4,684,883 Method of manufacturing high-quality semiconductor light-emitting devices 93 1985
 
BENDIX ELECTRONICS S.A. (1)
4,884,206 Process and processing circuit for the analog output signal of a sensor 54 1988
 
BROOKS AUTOMATION, INC. (1)
5,539,323 Sensor for articles such as wafers on end effector 115 1993
 
CEPROBE CORPORATION, A DE CORP. (1)
5,382,898 High density probe card for testing electrical circuits 100 1992
 
CERPROBE CORPORATION (1)
6,002,426 Inverted alignment station and method for calibrating needles of probe card for probe testing of integrated circuits 108 1997
 
CHARMILLES TECHNOLOGIES S.A. (1)
4,918,279 EDM cutting machine including device for preventing transmission of sealing plate movement to guide head arm 60 1988
 
CHENG, DAVID (1)
5,479,108 Method and apparatus for handling wafers 155 1992
 
CIRREX SYSTEMS LLC (1)
6,222,970 Methods and apparatus for filtering an optical fiber 129 1999
 
COMPAQ COMPUTER CORPORATION (1)
5,500,606 Completely wireless dual-access test fixture 112 1993
 
COMSAT CORPORATION (1)
4,365,195 Coplanar waveguide mounting structure and test fixture for microwave integrated circuits 69 1979
 
CONTRAVES AG (1)
4,567,908 Discharge system and method of operating same 50 1984
 
CORNELL RESEARCH FOUNDATION, INC. (1)
4,680,538 Millimeter wave vector network analyzer 71 1985
 
CREDENCE SYSTEMS CORPORATION (1)
5,883,523 Coherent switching power for an analog circuit tester 102 1997
 
CROWN PRODUCTS, INC. (1)
7,019,541 Electric conductivity water probe 94 2004
 
CSI TECHNOLOGY, INC. (1)
6,091,236 System and method for measuring and analyzing electrical signals on the shaft of a machine 93 1997
 
DAINIPPON SCREEN MFG. CO., LTD. (1)
4,531,474 Rotary board treating apparatus 87 1984
 
DEBIOTECH S.A. (1)
7,005,078 Micromachined fluidic device and method for making same 116 2001
 
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5,408,189 Test fixture alignment system for printed circuit boards 141 1992
 
DELPHI TECHNOLOGIES, INC. (1)
7,015,709 Ultra-broadband differential voltage probes 97 2004
 
DELTA DESIGN, INC. (1)
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DESIGNTECH INTERNATIONAL, INC. (1)
5,041,782 Microstrip probe 94 1989
 
DIGITAL TEST CORPORATION (1)
5,773,951 Wafer prober having sub-micron alignment accuracy 57 1996
 
DIMENSION POLYANT SAILCLOTH, INC. (1)
6,013,586 Tent material product and method of making tent material product 88 1997
 
DIT-MCO INTERNATIONAL CORPORATION (1)
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DRANETZ TECHNOLOGIES, INC., (1)
4,414,638 Sampling network analyzer with stored correction of gain errors 74 1981
 
EAST GIANT LIMITED (1)
5,879,289 Hand-held portable endoscopic camera 141 1996
 
EDO CORPORATION, BARNES DIVISION (1)
4,755,874 Emission microscopy system 154 1987
 
EJ SYSTEMS, INC. (1)
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2004/0100,276 Method and apparatus for calibration of a vector network analyzer 98 2002
 
ENDEVCO CORPORATION (1)
5,214,243 High-temperature, low-noise coaxial cable assembly with high strength reinforcement braid 123 1991
 
ENDWAVE CORPORATION (1)
6,023,209 Coplanar microwave circuit having suppression of undesired modes 69 1996
 
ERS ELECTRONIC GMBH (1)
2005/0227,503 Method and device for conditioning semiconductor wafers and/or hybrids 46 2005
 
ETS GOURDON (1)
5,034,688 Temperature conditioning support for small objects such as semi-conductor components and thermal regulation process using said support 133 1989
 
EUROPEAN ELECTRONIC TEST CENTRE (1)
5,006,796 Temperature control instrument for electronic components under test 84 1988
 
EVERETT CHARLES TECHNOLOGIES, INC. (1)
5,214,374 Dual level test fixture 99 1991
 
EVERETT/CHARLES CONTACT PRODUCTS, INC. (1)
4,352,061 Universal test fixture employing interchangeable wired personalizers 108 1979
 
FILOTEX (1)
5,397,855 Low noise cable 92 1993
 
FM INDUSTRIES, INC. (1)
5,572,398 Tri-polar electrostatic chuck 80 1994
 
FORMFACTOR, INC. (1)
7,002,363 Method and system for compensating thermally induced motion of probe cards 115 2001
 
FTS SYSTEMS, INC. (1)
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FUJIKURA LTD. (1)
4,626,618 DC electric power cable 97 1985
 
FUJIKURA RUBBER WORKS, LTD. (1)
4,425,395 Base fabrics for polyurethane-coated fabrics, polyurethane-coated fabrics and processes for their production 95 1982
 
FUJITSU LIMITED (1)
7,023,229 Dynamic burn-in equipment 50 2004
 
GENERAL ELECTRIC COMPANY (1)
7,015,690 Omnidirectional eddy current probe and inspection system 96 2004
 
GENERAL SIGNAL CORPORATION (1)
4,557,599 Calibration and alignment target plate 77 1984
 
GENRAD, INC. (1)
5,861,743 Hybrid scanner for use in an improved MDA tester 48 1995
 
GEO INTERNATIONAL CORPORATION (1)
4,675,600 Testing apparatus for plated through-holes on printed circuit boards, and probe therefor 65 1984
 
GGB INDUSTRIES, INC. (1)
5,373,231 Integrated circuit probing apparatus including a capacitor bypass structure 118 1993
 
H+W TEST PRODUCTS, INC. (1)
6,054,869 Bi-level test fixture for testing printed circuit boards 93 1998
 
HAMAMATSU PHOTONICS K.K. (1)
5,552,716 Method of positioning an electrooptic probe of an apparatus for the measurement of voltage 51 1994
 
HEIDELBERGER DRUCKMASCHINEN AG (1)
4,856,426 Sheet-fed rotary printing machine with printing units arranged in tandem 54 1985
 
HERSTEIN, DOV (1)
4,810,981 Assembly of microwave components 88 1987
 
HITACHI SOFTWARE ENGINEERING CO., LTD. (1)
7,035,738 Probe designing apparatus and probe designing method 92 2002
 
HITACHI ULSI SYSTEMS CO., LTD. (1)
6,734,687 Apparatus for detecting defect in device and method of detecting defect 107 2001
 
HONEYWELL INC. (1)
6,232,790 Method and apparatus for amplifying electrical test signals from a micromechanical device 60 1999
 
HONEYWELL INFORMATION SYSTEMS INC. (1)
4,342,958 Automatic test equipment test probe contact isolation detection method 70 1980
 
HYDRO-QUEBEC (1)
5,105,181 Method and electrical measuring apparatus for analyzing the impedance of the source of an actual alternating voltage 55 1990
 
HYNIX SEMICONDUCTOR INC. (1)
7,002,364 Semiconductor device for reducing the number of probing pad used during wafer test and method for testing the same 94 2003
 
HYPERVISION, INC. (1)
5,475,316 Transportable image emission microscope 129 1993
 
HYPRES, INC. (1)
4,894,612 Soft probe for providing high speed on-wafer connections to a circuit 153 1988
 
IGNITE SALES, INC. (1)
6,236,975 System and method for profiling customers for targeted marketing 358 1998
 
INTEGRAL TECHNOLOGIES, INC. (1)
7,006,046 Low cost electronic probe devices manufactured from conductive loaded resin-based materials 93 2004
 
INTEGRATED PROCESS EQUIPMENT CORP. (1)
5,515,167 Transparent optical chuck incorporating optical monitoring 130 1994
 
INTERSIL CORPORATION (1)
4,528,504 Pulsed linear integrated circuit tester 95 1982
 
INTEST CORPORATION (1)
5,900,737 Method and apparatus for automated docking of a test head to a device handler 112 1996
 
ITT CORPORATION (1)
5,105,148 Replaceable tip test probe 58 1991
 
JPK INSTRUMENTS AG (1)
7,022,985 Apparatus and method for a scanning probe microscope 97 2002
 
JUNKOSHA CO., LTD. (1)
4,567,321 Flexible flat cable 99 1984
 
KABUSHIKI KAISHA TOSHIBA (1)
7,032,307 Method for fabricating a probe pin for testing electrical characteristics of an apparatus 91 2004
 
KEITHLEY INSTRUMENTS, INC. (1)
6,121,783 Method and apparatus for establishing electrical contact between a wafer and a chuck 79 1997
 
KRAFTWERK UNION AKTIENGESELLSCHAFT (1)
4,642,417 Concentric three-conductor cable 112 1985
 
LAM RESEARCH CORPORATION (1)
7,015,703 Radio frequency Langmuir probe 93 2004
 
LOCKHEED MARTIN CORPORATION (1)
4,853,613 Calibration method for apparatus evaluating microwave/millimeter wave circuits 65 1987
 
LUCENT TECHNOLOGIES INC. (1)
6,245,692 Method to selectively heat semiconductor wafers 89 1999
 
M/A-COM TECHNOLOGY SOLUTIONS HOLDINGS, INC. (1)
5,142,224 Non-destructive semiconductor wafer probing system using laser pulses to generate and detect millimeter wave signals 101 1991
 
M/A-COM, INC. (1)
4,376,920 Shielded radio frequency transmission cable 139 1981
 
MAGMA DESIGN AUTOMATION, INC. (1)
5,030,907 CAD driven microprobe integrated circuit tester 110 1989
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (1)
5,998,768 Active thermal control of surfaces by steering heating beam in response to sensed thermal radiation 98 1998
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
5,594,358 Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line 96 1994
 
MAX-PLANCK-INSTITUT FUER EISENFORSCHUNG GMBH (1)
5,369,370 Method and apparatus for the measurement of the corrosion potential between a coated metal surface and a reference electrode 66 1992
 
MEASUREMENT SYSTEMS, INC. (1)
5,646,538 Method and apparatus for fastener hole inspection with a capacitive probe 52 1995
 
MEDICAL COLLEGE OF GEORGIA RESEARCH INSTITUTE, INC. (1)
5,488,954 Ultrasonic transducer and method for using same 125 1994
 
MEDXENSE AS (1)
7,003,184 Fiber optic probes 101 2001
 
MERCK & CO., INC. (1)
7,013,221 Iterative probe design and detailed expression profiling with flexible in-situ synthesis arrays 92 2000
 
MILLER DESIGN AND EQUIPMENT INC. (1)
5,303,938 Kelvin chuck apparatus and method of manufacture 59 1993
 
MITEL CORPORATION (1)
5,508,631 Semiconductor test chip with on wafer switching matrix 54 1994
 
MOTOROLA, INC. (1)
4,646,005 Signal probe 97 1984
 
MURATA MANUFACTURING CO., LTD. (1)
6,838,885 Method of correcting measurement error and electronic component characteristic measurement apparatus 97 2003
 
NANOMETRICS INCORPORATED (1)
4,818,169 Automated wafer inspection system 134 1985
 
NATIONAL METAL REFINING COMPANY (1)
4,566,184 Process for making a probe for high speed integrated circuits 100 1984
 
NEC ELECTRONICS CORPORATION (1)
6,320,396 Parasitic MIM structural spot analysis method for semiconductor device and parasitic MIM structure spot analysis method for silicon semiconductor device 97 1997
 
NIKON CORPORATION (1)
4,856,904 Wafer inspecting apparatus 114 1988
 
NORTHROP GRUMMAN SYSTEMS CORPORATION (1)
5,479,109 Testing device for integrated circuits on wafer 116 1994
 
NXP B.V. (1)
5,491,426 Adaptable wafer probe assembly for testing ICs with different power/ground bond pad configurations 76 1994
 
ORGANISATION EUROPEENNE POUR LA RECHERCHE NUCLEAIRE (1)
4,933,634 Device and method to measure a short radiation pulse or an electric pulse 61 1989
 
PINNACLE PRODUCTS, INC. (1)
5,807,107 Dental infection control system 90 1996
 
PRECISION DIVERSIFIED INDUSTRIES, INC. (1)
4,694,245 Vacuum-actuated top access test probe fixture 75 1984
 
PRODONT, INC. (1)
7,034,553 Direct resistance measurement corrosion probe 94 2003
 
RCA CORPORATION (1)
4,284,033 Means to orbit and rotate target wafers supported on planet member 112 1979
 
REAL LIVING, INC. (1)
6,236,977 Computer implemented marketing system 392 1999
 
RYODEN SEMICONDUCTOR SYSTEM ENGINEERING CORPORATION (1)
6,194,907 Prober and electric evaluation method of semiconductor device 60 1999
 
SAE MAGNETICS (H.K.) LTD. (1)
7,015,689 Connection method for probe pins for measurement of characteristics of thin-film magnetic head and characteristic measurement method for thin-film magnetic head 93 2003
 
SAMSUNG AEROSPACE INDUSTRIES, LTD. (1)
5,857,667 Vacuum chuck 65 1996
 
SAMSUNG ELECTRONICS CO., LTD. (1)
6,900,653 Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof 104 2003
 
SANDIA CORPORATION (1)
6,078,183 Thermally-induced voltage alteration for integrated circuit analysis 127 1998
 
SANTRONICS, INC. (1)
7,030,599 Hand held voltage detection probe 95 2004
 
SCIENCE & TECHNOLOGY CORPORATION @ UNM (1)
6,549,022 Apparatus and method for analyzing functional failures in integrated circuits 121 2000
 
SEIKO INSTRUMENTS INC. (1)
7,015,455 Near-field optical probe 91 2005
 
SEMICOA CORPORATION (1)
5,798,652 Method of batch testing surface mount devices using a substrate edge connector 77 1996
 
SEMICONDUCTOR DIAGNOSTICS, INC. (1)
6,114,865 Device for electrically contacting a floating semiconductor wafer having an insulating film 109 1999
 
SEMICONDUCTOR PHYSICS LABORATORY, INC. (1)
6,052,653 Spreading resistance profiling system 98 1997
 
SEMITEST, INC. (1)
5,091,691 Apparatus for making surface photovoltage measurements of a semiconductor 80 1988
 
SHARP KABUSHIKI KAISHA (1)
5,089,774 Apparatus and a method for checking a semiconductor 126 1990
 
SIGNATONE CORPORATION (1)
4,845,426 Temperature conditioner for tests of unpackaged semiconductors 104 1987
 
SII NANOTECHNOLOGY INC. (1)
6,621,082 Automatic focusing system for scanning electron microscope equipped with laser defect detection function 97 2002
 
SILICON GRAPHICS, INC. (1)
4,982,153 Method and apparatus for cooling an integrated circuit chip during testing 63 1989
 
SPECTROSCOPY IMAGING SYSTEMS CORPORATION (1)
4,916,398 Efficient remote transmission line probe tuning for NMR apparatus 93 1988
 
ST. CLAIR INTELLECTUAL PROPERTY CONSULTANTS, INC. (1)
4,904,933 Integrated circuit probe station 111 1986
 
STMICROELECTRONICS S.A. (1)
6,480,013 Method for the calibration of an RF integrated circuit probe 99 2000
 
STORAGE TECHNOLOGY CORPORATION (1)
5,469,324 Integrated decoupling capacitive core for a printed circuit board and method of making same 119 1994
 
SYM-TEK INCORPORATED OF MINNESOTA (1)
4,926,118 Test station 120 1988
 
SYNOPSYS, INC. (1)
5,682,337 High speed three-state sampling 53 1995
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
6,902,941 Probing of device elements 98 2003
 
TAKEDA RIKEN CO., LTD. (1)
4,691,831 IC test equipment 53 1985
 
TELEDYNE LECROY, INC. (1)
7,019,544 Transmission line input structure test probe 93 2004
 
TENCOR INSTRUMENTS (1)
4,755,746 Apparatus and methods for semiconductor wafer testing 154 1985
 
THE BOEING COMPANY (1)
4,727,637 Computer aided connector assembly method and apparatus 109 1987
 
THE JOHNS HOPKINS UNIVERSITY (1)
6,284,971 Enhanced safety coaxial cables 94 1999
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY (1)
4,479,690 Underwater splice for submarine coaxial cable 59 1982
 
THERMOCARBON, INC. (1)
5,676,360 Machine tool rotary table locking apparatus 112 1995
 
THK CO., LTD. (1)
4,899,998 Rotational positioning device 105 1988
 
TOKYO OHKA KOGYO CO., LTD. (1)
5,571,324 Rotary-cup coating apparatus 102 1994
 
TOKYO SHIBAURA DENKI KABUSHIKI KAISHA (1)
4,532,423 IC Tester using an electron beam capable of easily setting a probe card unit for wafers & packaged IC's to be tested 97 1983
 
TOVEX TECH, INC. (1)
5,065,089 Circuit handler with sectioned rail 56 1990
 
TOYODA GOSEI CO., LTD. (1)
6,843,024 Weather strip including core-removal slot 48 2002
 
TRANSAT CORPORATION (1)
5,451,884 Electronic component temperature test system with flat ring revolving carriage 99 1993
 
TRANSPACIFIC IP LTD. (1)
5,942,907 Method and apparatus for testing dies 50 1997
 
TRIPLE S ENGINEERING, INC. (1)
5,065,092 System for locating probe tips on an integrated circuit probe card and method therefor 90 1990
 
TRUSTEES OF THE THOMAS A.O. GROSS 1988 REVOCABLE TRUST, C/O JUDITH C.F. GROSS (1)
5,218,185 Elimination of potentially harmful electrical and magnetic fields from electric blankets and other electrical appliances 70 1989
 
UNIVERSITY OF SOUTH FLORIDA (1)
5,835,997 Wafer shielding chamber for probe station 60 1995
 
VEECO METROLOGY INC. (1)
7,001,785 Capacitance probe for thin dielectric film characterization 98 2004
 
VISTATECH CORPORATION, A CORP. OF DE (1)
4,371,742 EMI-Suppression from transmission lines 91 1979
 
YAMAICHI DENKI KOGYO KABUSHIKI KAISHA (1)
4,978,914 Laminated board for testing electronic components 64 1990
 
YUGEN KAISHA SOZOAN (1)
5,481,936 Rotary drive positioning system for an indexing table 110 1994
 
YULIM HITECH, INC. (1)
7,014,499 Probe card for testing semiconductor device 91 2005
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (17)
4,284,682 Heat sealable, flame and abrasion resistant coated fabric 122 1980
4,480,223 Unitary probe assembly 133 1981
4,812,754 Circuit board interfacing apparatus 115 1987
4,711,563 Portable collapsible darkroom 88 1987
4,731,577 Coaxial probe card 116 1987
4,791,363 Ceramic microstrip probe blade 135 1987
5,371,457 Method and apparatus to test for current in an integrated circuit 92 1991
5,209,088 Changeable code lock 62 1991
5,220,277 Arrangement for testing semiconductor wafers or the like 101 1992
5,670,888 Method for transporting and testing wafers 124 1995
5,831,442 Handling device 94 1996
5,675,932 Plant growing system 89 1996
5,949,579 Flexible darkness adapting viewer 87 1997
6,147,851 Method for guarding electrical regions having potential gradients 89 1999
7,015,707 Micro probe 107 2003
2004/0193,382 Method and apparatus for calibrating a multiport test system for measurement of a DUT 94 2004
2006/0114,012 Method and apparatus for testing semiconductor wafers by means of a probe card 46 2005

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
CASCADE MICROTECH, INC. (3)
8,069,491 Probe testing structure 0 2007
7,969,173 Chuck for holding a device under test 1 2007
8,319,503 Test apparatus for measuring a characteristic of a device under test 0 2009

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