Probe testing structure

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7250626
APP PUB NO 20050088191A1
SERIAL NO

10794246

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A calibration structure for probing devices.

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First Claim

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Family

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CASCADE MICROTECH, INC.BEAVERTON, OR141

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lesher, Timothy E Portland, OR 2 9

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (17)
4284682 Heat sealable, flame and abrasion resistant coated fabric 127 1980
4480223 Unitary probe assembly 137 1981
4812754 Circuit board interfacing apparatus 118 1987
4711563 Portable collapsible darkroom 90 1987
4731577 Coaxial probe card 121 1987
4791363 Ceramic microstrip probe blade 137 1987
5371457 Method and apparatus to test for current in an integrated circuit 99 1991
5209088 Changeable code lock 66 1991
5220277 Arrangement for testing semiconductor wafers or the like 103 1992
5670888 Method for transporting and testing wafers 128 1995
5831442 Handling device 96 1996
5675932 Plant growing system 94 1996
5949579 Flexible darkness adapting viewer 89 1997
6147851 Method for guarding electrical regions having potential gradients 92 1999
7015707 Micro probe 121 2003
2004/0193,382 Method and apparatus for calibrating a multiport test system for measurement of a DUT 100 2004
2006/0114,012 Method and apparatus for testing semiconductor wafers by means of a probe card 48 2005
 
John H. Blanz Company, Inc. (4)
5097207 Temperature stable cryogenic probe station 107 1989
5077523 Cryogenic probe station having movable chuck accomodating variable thickness probe cards 103 1990
5160883 Test station having vibrationally stabilized X, Y and Z movable integrated circuit receiving support 96 1990
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4772846 Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy 141 1986
5583445 Opto-electronic membrane probe 103 1994
 
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4853613 Calibration method for apparatus evaluating microwave/millimeter wave circuits 66 1987
 
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4906920 Self-leveling membrane probe 207 1988
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5945836 Loaded-board, guided-probe test fixture 133 1996
5923177 Portable wedge probe for perusing signals on the pins of an IC 49 1997
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6060888 Error correction method for reflection measurements of reciprocal devices in vector network analyzers 113 1998
6271673 Probe for measuring signals 105 1999
6643597 Calibrating a test system using unknown standards 119 2001
6873167 Connection box, system, and method for evaluating a DUT board 52 2002
7025628 Electronic probe extender 117 2003
2004/0162,689 Multiport network analyzer calibration employing reciprocity of a device 95 2004
7005868 Apparatus and method for canceling DC errors and noise generated by ground shield current in a probe 94 2004
7026834 Multiple two axis floating probe block assembly using split probe block 93 2005
 
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4933634 Device and method to measure a short radiation pulse or an electric pulse 66 1989
 
SV PROBE PTE LTD. (2)
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SYM-TEK INCORPORATED OF MINNESOTA (1)
4926118 Test station 120 1988
 
CHENG, DAVID (1)
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CORNELL UNIVERSITY (1)
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Yugen Kaisha Sozoan (1)
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UNIVERSITY OF SOUTH FLORIDA (1)
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5506515 High-frequency probe tip assembly 160 1994
5532609 Wafer probe station having environment control enclosure 70 1995
5561377 System for evaluating probing networks 66 1995
5610529 Probe station having conductive coating added to thermal chuck insulator 139 1995
5565788 Coaxial wafer probe with tip shielding 148 1995
5663653 Wafer probe station for low-current measurements 73 1995
5729150 Low-current probe card with reduced triboelectric current generating cables 138 1995
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6313649 Wafer probe station having environment control enclosure 57 1997
6232788 Wafer probe station for low-current measurements 88 1997
6232789 Probe holder for low current measurements 87 1997
5869975 System for evaluating probing networks that have multiple probing ends 56 1997
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6002263 Probe station having inner and outer shielding 60 1997
6034533 Low-current pogo probe card 113 1997
6137302 Low-current probe card with reduced triboelectric current generating cables 113 1997
5973505 System for evaluating probing networks 54 1998
6445202 Probe station thermal chuck with shielding for capacitive current 50 1999
6252392 Probe station having environment control chamber with bendably extensible and retractable lateral wall assembly 51 1999
6130544 System for evaluating probing networks 51 1999
6288557 Probe station having inner and outer shielding 51 1999
6483336 Indexing rotatable chuck for a probe station 53 2000
6608496 Reference transmission line junction for probing device 56 2000
6335628 Wafer probe station for low-current measurements 54 2001
6380751 Wafer probe station having environment control enclosure 50 2001
6362636 Probe station having multiple enclosures 53 2001
6549106 Waveguide with adjustable backshort 174 2001
6492822 Wafer probe station for low-current measurements 51 2001
6489789 Probe station having multiple enclosures 50 2001
6486687 Wafer probe station having environment control enclosure 51 2002
6771090 Indexing rotatable chuck for a probe station 57 2002
6836135 Optical testing device 52 2002
6636059 Wafer probe station having environment control enclosure 50 2002
6639415 Probe station having multiple enclosures 49 2002
6720782 Wafer probe station for low-current measurements 47 2002
6777964 Probe station 52 2002
6724205 Probe for combined signals 98 2002
6642732 Probe station thermal chuck with shielding for capacitive current 48 2002
6861856 Guarded tub enclosure 51 2002
6801047 Wafer probe station having environment control enclosure 48 2003
6842024 Probe station having multiple enclosures 47 2003
6847219 Probe station with low noise characteristics 63 2003
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5410259 Probing device setting a probe card parallel 141 1993
5404111 Probe apparatus with a swinging holder for an object of examination 114 1993
5521522 Probe apparatus for testing multiple integrated circuit dies 144 1993
5550482 Probe device 105 1994
5777485 Probe method and apparatus with improved probe contact 119 1996
5640101 Probe system and probe method 69 1996
5828225 Semiconductor wafer probing apparatus 73 1996
5910727 Electrical inspecting apparatus with ventilation system 90 1996
5804983 Probe apparatus with tilt correction mechanisms 153 1997
5999268 Apparatus for aligning a semiconductor wafer with an inspection contactor 120 1997
6037793 Inspecting method and apparatus for semiconductor integrated circuit 73 1998
6124725 Apparatus and method for testing semiconductor devices formed on a semiconductor wafer 138 1998
6501289 Inspection stage including a plurality of Z shafts, and inspection apparatus 84 2000
7005842 Probe cartridge assembly and multi-probe assembly 93 2001
7101797 Substrate processing device and processing method 46 2003
7026832 Probe mark reading device and probe mark reading method 96 2003
7009415 Probing method and probing apparatus 95 2004
7023226 Probe pins zero-point detecting method, and prober 93 2004
 
NGK INSULATORS, LTD. (2)
5280156 Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means 221 1991
6001760 Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck 117 1997
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
6902941 Probing of device elements 100 2003
 
TRANSPACIFIC IP LTD. (1)
5942907 Method and apparatus for testing dies 51 1997
 
APEX MICROTECHNOLOGY, INC. (1)
4871965 Environmental testing facility for electronic components 66 1988
 
HITACHI, LTD. (2)
4383178 System for driving rotary member in vacuum 87 1981
2005/0186,696 Gas flowmeter and manufacturing method thereof 0 2005
 
DCG SYSTEMS, INC. (2)
5530372 Method of probing a net of an IC at an optimal probe-point 119 1994
5675499 Optimal probe point placement 111 1996
 
TRUSTEES OF THE THOMAS A.O. GROSS 1988 REVOCABLE TRUST, C/O JUDITH C.F. GROSS (1)
5218185 Elimination of potentially harmful electrical and magnetic fields from electric blankets and other electrical appliances 82 1989
 
APPLE INC. (1)
5617035 Method for testing integrated devices 110 1995
 
The United States of America as represented by the United States Department of Energy (3)
4896109 Photoconductive circuit element reflectometer 65 1987
5523694 Integrated circuit failure analysis by low-energy charge-induced voltage alteration 122 1994
6407560 Thermally-induced voltage alteration for analysis of microelectromechanical devices 89 2000
 
KABUSHIKI KAISHA TOSHIBA (1)
7032307 Method for fabricating a probe pin for testing electrical characteristics of an apparatus 93 2004
 
BELL TELEPHONE LABORATORIES, INCORPORATED (1)
4684883 Method of manufacturing high-quality semiconductor light-emitting devices 97 1985
 
AT&T Information Systems Inc. (1)
4978907 Apparatus and method for expanding the frequency range over which electrical signal amplitudes can be accurately measured 53 1989
 
RAYTHEON COMPANY (2)
4346355 Radio frequency energy launcher 96 1980
5731708 Unpackaged semiconductor testing using an improved probe and precision X-Y table 58 1995
 
TENCOR INSTRUMENTS (1)
4755746 Apparatus and methods for semiconductor wafer testing 156 1985
 
THK CO., LTD. (1)
4899998 Rotational positioning device 107 1988
 
EATON CORPORATION (2)
4665360 Docking apparatus 68 1985
4904935 Electrical circuit board text fixture having movable platens 114 1988
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (14)
4744041 Method for testing DC motors 119 1985
5001423 Dry interface thermal chuck temperature control system for semiconductor wafer testing 135 1990
5144228 Probe interface assembly 86 1991
5210485 Probe for wafer burn-in test system 101 1991
5334931 Molded test probe assembly 93 1991
5221905 Test system with reduced test contact interface resistance 59 1992
5546012 Probe card assembly having a ceramic probe card 64 1994
5530371 Probe card assembly 69 1995
5629631 Interface card for a probe card assembly 86 1995
5804982 Miniature probe positioning actuator 106 1995
5561585 Electrostatic chuck with reference electrode 64 1995
6043667 Substrate tester location clamping, sensing, and contacting method and apparatus 79 1997
6791344 System for and method of testing a microelectronic device using a dual probe technique 64 2000
7007380 TFI probe I/O wrap test method 93 2004
 
ADVANCED MICRO DEVICES, INC. (1)
6396296 Method and apparatus for electrical characterization of an integrated circuit package using a vertical probe station 103 2000
 
SIEMENS AKTIENGESELLSCHAFT (1)
5095891 Connecting cable for use with a pulse generator and a shock wave generator 98 1987
 
KEYSIGHT TECHNOLOGIES, INC. (4)
5493070 Measuring cable and measuring system 99 1994
6300775 Scattering parameter calibration system and method 130 1999
2004/0095,145 Method and apparatus for performing multiport through-reflect-line calibration and measurement 97 2002
2004/0199,350 System and method for determining measurement errors of a testing device 94 2003
 
FUJITSU LIMITED (1)
7023229 Dynamic burn-in equipment 53 2004
 
HP HOLDINGS THREE, INC. (2)
5336989 AC mains test apparatus and method 48 1991
5995914 Method and apparatus for asynchronously measuring frequency shifted signals 103 1996
 
Triple S Engineering, Inc. (1)
5065092 System for locating probe tips on an integrated circuit probe card and method therefor 95 1990
 
EVERETT CHARLES TECHNOLOGIES, INC. (1)
5214374 Dual level test fixture 105 1991
 
Integral Technologies, Inc. (1)
7006046 Low cost electronic probe devices manufactured from conductive loaded resin-based materials 95 2004
 
W. L. GORE & ASSOCIATES, INC. (6)
4871883 Electro-magnetic shielding 121 1987
4859989 Security system and signal carrying member thereof 130 1987
5061823 Crush-resistant coaxial transmission line 136 1990
5107076 Easy strip composite dielectric coaxial signal cable 126 1991
5477011 Low noise signal transmission cable 113 1994
7015708 Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts 95 2003
 
SEMICOA CORPORATION (1)
5798652 Method of batch testing surface mount devices using a substrate edge connector 77 1996
 
CROWN PRODUCTS, INC. (1)
7019541 Electric conductivity water probe 97 2004
 
SEMICONDUCTOR DIAGNOSTICS, INC. (1)
6114865 Device for electrically contacting a floating semiconductor wafer having an insulating film 112 1999
 
LAM RESEARCH CORPORATION (1)
7015703 Radio frequency Langmuir probe 103 2004
 
FREESCALE SEMICONDUCTOR, INC. (4)
4968931 Apparatus and method for burning in integrated circuit wafers 168 1989
5550480 Method and means for controlling movement of a chuck in a test apparatus 79 1994
5666063 Method and apparatus for testing an integrated circuit 107 1996
6111419 Method of processing a substrate including measuring for planarity and probing the substrate 56 1998
 
EDO CORPORATION, BARNES DIVISION (1)
4755874 Emission microscopy system 165 1987
 
CEPROBE CORPORATION, A DE CORP. (1)
5382898 High density probe card for testing electrical circuits 103 1992
 
Digital Test Corporation (1)
5773951 Wafer prober having sub-micron alignment accuracy 62 1996
 
JPK Instruments AG (1)
7022985 Apparatus and method for a scanning probe microscope 99 2002
 
TOYODA GOSEI CO., LTD. (1)
6843024 Weather strip including core-removal slot 49 2002
 
Medical College of Georgia Research Institute (1)
5488954 Ultrasonic transducer and method for using same 146 1994
 
MAGMA DESIGN AUTOMATION, INC. (1)
5030907 CAD driven microprobe integrated circuit tester 113 1989
 
HITACHI SOFTWARE ENGINEERING CO., LTD. (1)
7035738 Probe designing apparatus and probe designing method 94 2002
 
FTS SYSTEMS, INC. (1)
4787752 Live component temperature conditioning device providing fast temperature variations 82 1986
 
GENERAL ELECTRIC COMPANY (1)
7015690 Omnidirectional eddy current probe and inspection system 100 2004
 
COMPAQ COMPUTER CORPORATION (1)
5500606 Completely wireless dual-access test fixture 114 1993
 
HITACHI ULSI SYSTEMS CO., LTD. (1)
6734687 Apparatus for detecting defect in device and method of detecting defect 112 2001
 
RUDOLPH TECHNOLOGIES, INC. (2)
4918374 Method and apparatus for inspecting integrated circuit probe cards 105 1988
6710798 Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card 118 1999
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5847569 Electrical contact probe for sampling high frequency electrical signals 98 1996
5802856 Multizone bake/chill thermal cycling module 278 1997
 
SAE MAGNETICS (H.K.) LTD. (1)
7015689 Connection method for probe pins for measurement of characteristics of thin-film magnetic head and characteristic measurement method for thin-film magnetic head 95 2003
 
BROOKS AUTOMATION, INC. (1)
5539323 Sensor for articles such as wafers on end effector 126 1993
 
Yulim Hitech, Inc. (1)
7014499 Probe card for testing semiconductor device 96 2005
 
HYDRO-QUEBEC (1)
5105181 Method and electrical measuring apparatus for analyzing the impedance of the source of an actual alternating voltage 56 1990
 
REAL LIVING, INC. (1)
6236977 Computer implemented marketing system 557 1999
 
EASTMAN KODAK COMPANY (3)
5019692 Thermostatic device for fuser 47 1990
5848500 Light-tight enclosure and joint connectors for enclosure framework 114 1997
6624891 Interferometric-based external measurement system and method 49 2001
 
HERSTEIN, DOV (1)
4810981 Assembly of microwave components 91 1987
 
GILBOE, DEREK (1)
7034553 Direct resistance measurement corrosion probe 96 2003
 
Temptronic Corporation (5)
4426619 Electrical testing system including plastic window test chamber and method of using same 69 1981
4491173 Rotatable inspection table 70 1982
4734872 Temperature control for device under test 102 1985
4784213 Mixing valve air source 81 1986
4759712 Device for applying controlled temperature stimuli to nerve sensitive tissue 52 1986
 
DAYMARC CORPORATION (2)
4419626 Broad band contactor assembly for testing integrated circuit devices 78 1981
4473798 Interface assembly for testing integrated circuit devices 72 1981
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
STATS CHIPPAC PTE. LTE. (1)
8614508 Integrated circuit system with test pads and method of manufacture thereof 0 2011
 
CASCADE MICROTECH, INC. (3)
* 8069491 Probe testing structure 2 2007
7969173 Chuck for holding a device under test 2 2007
8319503 Test apparatus for measuring a characteristic of a device under test 2 2009
* Cited By Examiner

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