Fingerprint sensor
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United States of America Patent
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Jul 31, 2007
Grant Date -
Mar 18, 2004
app pub date -
Sep 11, 2002
filing date -
Sep 26, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention relates to a fingerprints detection apparatus by a capacitance detection method. The fingerprints detection apparatus of the present invention includes a sensor portion in which an insulating protection film is formed so as to cover detection electrodes arranged like an array, and the detection electrodes and the wiring beneath the detection electrodes are formed of a refractory metal or a compound of the refractory metal. This structure heightens the Vickers hardness of the detection electrodes and the wiring. This makes it possible to provide a highly reliable fingerprints detection apparatus in which a tolerance to cracks of the insulating protection film in the sensor portion is improved.
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Family
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