Beam splitter/combiner for optical metrology tool

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7251036
APP PUB NO 20060126071A1
SERIAL NO

11334999

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A combiner for optical beams includes a substrate overlaid by a multi-layer dielectric film stack. The substrate is a clear material and the dielectric film stack is a series of alternating layer of high and low refractive index. This gives the combiner relatively high reflectivity across UV wavelengths and relatively high transmissivity in the visible and longer wavelengths and allows visible light to pass through the combiner while UV light is reflected. At the same time dielectric film stack has minimal absorption and scatter. This means that the intensity of visible light maintains at least 90% of its intensity as it passes through combiner and UV light retains at least 90% of its intensity as it is reflected by combiner.

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Patent Owner(s)

  • THERMA-WAVE, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ellison, Michael Boulder, CO 5 16
Hendrix, James Livermore, CA 7 24
Ng, Joel San Leandro, CA 7 22
Wang, David Fremont, CA 200 2521

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