Perpendicular pole having and adjacent non-magnetic CMP resistant structure
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United States of America Patent
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Jul 31, 2007
Grant Date -
Aug 25, 2005
app pub date -
Jun 30, 2004
filing date -
Feb 23, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
A magnetic structure, such as a pole tip, and method for forming the same includes forming a pole tip layer of magnetic material. A layer of polyimide precursor material is added above the pole tip layer and cured. A silicon-containing resist layer is added above the layer of polyimide precursor material and patterned. The resist layer is exposed to oxygen plasma for converting the resist into a glass-like material. Exposed portions of the cured polyimide precursor material are removed for exposing portions of the pole tip layer. The exposed portions of the pole tip layer are removed for forming a pole tip. Chemical mechanical polishing (CMP) can then be performed to remove any unwanted material remaining above the pole tip.
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