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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
LAM RESEARCH CORPORATION	FREMONT CA

International Classification(s)

• B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Boyd, John M	Atascadero, CA	104	1753
de, Larios John M	Palo Alto, CA	72	1005
Ravkin, Michael	Sunnyvale, CA	72	1438
Redeker, Fred C	Fremont, CA	195	5499

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 07, 2007	US,7252097,B2   US7252097B2	GRANTED PATENT AS SECOND PUBLICATION
September 23, 2004	US,20040182422,A1   US20040182422A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 7252097

System and method for integrating in-situ metrology within a wafer process

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