Probe card with tunable stage and at least one replaceable probe
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 7, 2007
Grant Date -
Aug 11, 2005
app pub date -
Feb 2, 2005
filing date -
Feb 11, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present probe card comprises a circuit board, a platform fixed on the circuit board, a tunable stage positioned on the platform, a probe carrier positioned on the tunable stage and at least one probe positioned on the probe carrier. The tunable stage comprises a stationary part positioned on the platform, a movable part for loading the probe carrier and a driving mechanism connecting the stationary part and the movable part. The probe carrier is positioned on the movable part and the relative position between the probe on the probe carrier and a DUT can be adjusted by the driving mechanism.
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