Notched compound semiconductor wafer
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 14, 2007
Grant Date -
Jun 1, 2006
app pub date -
Nov 7, 2005
filing date -
Sep 14, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
There is provided a notched compound semiconductor crystal having the same specification even if it is turned over. With respect to a compound semiconductor wafer produced by slicing a compound semiconductor crystal having a crystal plane of (100) plane, the crystal is sliced so as to be tilted from the (100) plane in a direction of [101] or [10-1] when a notch is formed in a direction of [010], or the crystal is sliced so as to be tilted from the (100) plane in a direction of [0-10] or [010] when a notch is formed in a direction of [001], or the crystal is sliced so as to be tilted from the (100) plane in a direction of [001] or [00-1] when a notch is formed in a direction of [0-10], or the crystal is sliced so as to be tilted from the (100) plane in a direction of [010] or [0-10] when a notch is formed in a direction of [00-1].
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