Stage device
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United States of America Patent
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-
Aug 21, 2007
Grant Date -
Feb 15, 2007
app pub date -
Sep 18, 2006
filing date -
Mar 19, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.
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