Pressure sensor having thin pressure sensing membrane
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United States of America Patent
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-
Aug 28, 2007
Grant Date -
Oct 5, 2006
app pub date -
Jun 5, 2006
filing date -
Oct 18, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A pressure sensor is provided having a chamber partially defined by a flexible membrane which is less than three microns thick, exposed to fluid pressure and is configured to deflect from a reference position due to changes in the fluid pressure, and associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure.
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