Gyro-sensor comprising a plurality of component units, and fabricating method thereof
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United States of America Patent
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Sep 4, 2007
Grant Date -
Dec 1, 2005
app pub date -
Jun 1, 2005
filing date -
Jun 1, 2004
priority date (Note) -
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Abstract
Provided are a gyro-sensor including a plurality of component units and a method of fabricating the gyro-sensor. The gyro-sensor includes: a substrate; a micro electro mechanical system structure including a surface including a predetermined area in which a cavity is formed and connected to an upper surface of the substrate to output a vibration signal proportional to an external rotation force; and a circuit unit positioned in the cavity, converting the vibration signal into a predetermined electric signal proportional to a circular angular velocity, and outputting the predetermined electric signal.
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