Method and apparatus for cleaning a substrate using megasonic power
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United States of America Patent
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Sep 4, 2007
Grant Date -
Apr 15, 2004
app pub date -
Jun 30, 2003
filing date -
Sep 30, 2002
priority date (Note) -
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Abstract
A method for processing a substrate is provided that includes generating a fluid meniscus on a surface of the substrate and applying acoustic energy to the fluid meniscus. The method also includes moving the fluid meniscus over the surface the substrate to process the surface of the substrate.
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