Importance

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Abstract

The invention aims to provide a vertical type probe card in which a probe can scrape an oxide film on a surface of an electrode of the measurement object, thereby ensuring stable contact with the electrode of the measurement object. A probe card A includes: first and second probes 100a and 100b; a guide substrate 200 in which a plurality of guide holes 210 are formed through which the first and second probes 100a and 100b are inserted in a freely movable manner; a support member 400 provided above the guide substrate 200; a first sheet member 300a of flexibility, attached to the support member 400, having a first electrode pad 310a on its surface, in which a tail end 120a of the first probe 100a projecting out from the guide hole 210 is brought into contact with the first electrode pad 310a; a second sheet member 300b of flexibility, attached to the support member 400, having a second electrode pad 310b on its surface, in which a tail end 120b of the second probe 100b projecting out from the guide hole 210 and penetrating through the first sheet member 300a is brought into contact with the second electrode pad 310b; and vibrating means 500 attached to the support member 400, wherein the vibrating means 500 vibrates the first and second probes 100a and 100b via the support member 400 and the first and second sheet members 300a and 300b.

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First Claim