Shielded probe for testing a device under test
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United States of America Patent
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Sep 18, 2007
Issued Date -
N/A
app pub date -
Mar 28, 2006
filing date -
May 23, 2003
priority date (Note) -
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Abstract
A probe measurement system for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies. The probe measurement system preferably includes a probe having a conductive path extending between the first and second surfaces of a membrane and a probe contact electrically connected to the conductive path.
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