Method, system and medium for controlling manufacture process having multivariate input parameters

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United States of America Patent

PATENT NO 7272459
APP PUB NO 20040225377A1
SERIAL NO

10712273

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Abstract

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A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes the step of identifying one or more input parameters. Each input parameter causes a change in at least two outputs. The method also includes the step of storing values of the identified inputs and corresponding empirical output values along with predicted output values. The predicted output values are calculated based on, in part, the values of the identified inputs. The method also includes the step of calculating a set of transform coefficients by minimizing a score equation that is a function of differences between one or more of the empirical output values and their corresponding predicted output values. The method further includes the steps of receiving a new set of values for the identified inputs, transforming the new set of values for the identified input using the set of coefficients, and calculating a set of predicted output values using the transformed input values.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL INC9 OPPENHEIMER STREET REHOVOT 76705

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Entin, Efim Jersusalem, IL 7 133
Fisher, Yossi Jerusalem, IL 13 223
Kokotov, Yuri Maaleh Adumim, IL 18 322
Paik, Young Jeen Campbell, CA 6 147
Sarel, Shalomo Maaleh Michmas, IL 2 47
Schwarm, Alexander T Austin, TX 35 1146
Seror, Jacques Jerusalem, IL 7 166
Shanmugasundram, Arulkumar P Sunnyvale, CA 18 707

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