Vacuum compatible, high-speed, 2-D mirror tilt stage

United States of America Patent

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Sep 25, 2007
Grant Date
Nov 23, 2006
app pub date
May 19, 2005
filing date
May 19, 2005

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Abstract

A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.

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Patent Owner	Address
EUV LLC	2200 MISSION COLLEGE BLVD MS SCI-02 SANTA CLARA CA 95052-8119

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G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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Inventor Name	Address	# of filed Patents	Total Citations
Denham, Paul E	Crockett, CA	2	9

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Vacuum compatible, high-speed, 2-D mirror tilt stage

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11132783

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PATENT NO	7273289
APP PUB NO	20060262435A1
SERIAL NO	11132783
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
September 25, 2007	US,7273289,B2 US7273289B2	GRANTED PATENT AS SECOND PUBLICATION
November 23, 2006	US,20060262435,A1 US20060262435A1	FIRST PUBLISHED PATENT APPLICATION

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11132783

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