Method and device for controlling position of cassette in semiconductor manufacturing equipment
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United States of America Patent
Stats
-
Oct 2, 2007
Grant Date -
Dec 1, 2005
app pub date -
Apr 14, 2005
filing date -
May 17, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A cassette position control device controls the position of a cassette in which wafers are stored, when the wafer cassette is loaded on a cassette support. In addition to the cassette support, the device has a cassette moving section and a control section. The control section senses the state of the wafer cassette on the cassette support, and generates and outputs a motor drive signal to move the cassette to a designated relative position on the cassette support. The cassette moving section moves the wafer cassette to the designated position in response to the motor drive signal. Therefore, wafers can be loaded/unloaded to and from the same designated position after the wafer cassette has been placed on a cassette support.
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