Fast Si diodes and arrays with high quantum efficiency built on dielectrically isolated wafers

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United States of America Patent

PATENT NO 7276770
SERIAL NO

11102264

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Abstract

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Fast silicon diodes and arrays with high quantum efficiency built on dielectrically isolated wafers. A waveguide is formed in the top surface of the silicon that utilizes total internal reflection from the Si--Si Oxide interface to form an internal mirror. This mirror reflects incoming light into the waveguide cavity, with the light being trapped there by surrounding reflective interfaces. A masking layer may be used to define an input window. Individual diodes or linear arrays may be formed as desired. Some alternate embodiments are described.

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Patent Owner(s)

Patent OwnerAddress
ARRAY OPTRONIX INC3198 AIRPORT LOOP DRIVE SUITE A2 COSTA MESA CA 92626

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goushcha, Alexander O Aliso Viejo, CA 13 285
Metzler, Richard A Medina, OH 24 581

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