Ultraviolet laser apparatus and exposure apparatus using same
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United States of America Patent
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Oct 2, 2007
Grant Date -
Jan 11, 2007
app pub date -
Sep 13, 2006
filing date -
Mar 11, 1998
priority date (Note) -
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Abstract
A laser apparatus including a laser generating portion that generates pulse light having a single wavelength within a range from an infrared band to a visible band. An optical amplifier is optically connected to the laser generating portion, and includes a plurality of fiber optical amplifiers to amplify the pulse light a plurality of times. A wavelength converting portion is optically connected to the optical amplifier, and includes cylindrical lenses and a plurality of non-linear optical crystals to wavelength-convert the amplified pulse light into ultraviolet light. The amplified pulse light is incident on the cylindrical lenses through one of the plurality of non-linear optical crystals and is incident on a different one of the plurality of non-linear optical crystals from the one non-linear optical crystal through the cylindrical lenses.
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