Micro-electro-mechanical switch and a method of using and making thereof
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United States of America Patent
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Oct 9, 2007
Grant Date -
Sep 19, 2002
app pub date -
Mar 12, 2002
filing date -
Mar 13, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A micro-electro-mechanical switch includes at least one portion of a conductive line in the chamber, a beam with imbedded charge, and control electrodes. The beam has a conductive section which is positioned in substantial alignment with the at least one portion of the conductive line. The conductive section of the beam has an open position spaced away from the at least one portion of the conductive line and a closed position on the at least one portion of the conductive line. Each of the control electrodes is spaced away from an opposing side of the beam to control movement of the beam.
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