Method of processing a workpiece
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United States of America Patent
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Oct 16, 2007
Grant Date -
Sep 29, 2005
app pub date -
Mar 24, 2005
filing date -
Mar 26, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
This invention relates to a method of processing a workpiece in a chamber. Initially a surface of the workpiece is treated by a process which includes supplying a reactive gas to the chamber through a first gas supply and the surface is then further treated using a process gas supplied to the chamber through a second gas supply during the supply of the process gas so that a portion of the process gas flows into the first gas supply from the chamber to mitigate against residual reactive gas entering the chamber during the further treatment step.
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