Method for producing a pressure sensor for detecting small pressure differences and low pressures
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United States of America Patent
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Oct 23, 2007
Grant Date -
Dec 1, 2005
app pub date -
Dec 15, 2004
filing date -
Dec 22, 1997
priority date (Note) -
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Abstract
A process for producing a plate for a capacitive sensor element. In one embodiment of the present invention, a method includes forming a plate from a substantially pure aluminum oxide slurry, heating the plate a first time in an oven to sinter the plate, cooling the plate after the heating step, heating the plate a second time to smooth the plate, and cooling the plate after the second heating.
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