Developing process and apparatus
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United States of America Patent
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Oct 30, 2007
Grant Date -
Dec 14, 2006
app pub date -
Jun 8, 2005
filing date -
Jun 8, 2005
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The invention discloses a developing apparatus and a developing process. Wherein the developing process comprises following steps. First, a developing apparatus and a substrate are provided, wherein the developing apparatus comprises a conveyer and a nozzle. Then, the substrate is conveyed along a first direction by the conveyer, and the nozzle is driven to move along a second direction opposite to the first direction, wherein the nozzle sprays a developer over the substrate as moving. As mentioned above, the non-uniformity of development can be reduced.
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