Method and arrangement for treating a substrate with an atmospheric pressure glow plasma (APG)
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United States of America Patent
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Oct 30, 2007
Grant Date -
Jan 22, 2004
app pub date -
Jul 19, 2002
filing date -
Jul 19, 2002
priority date (Note) -
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Abstract
Method for generating an atmospheric pressure glow plasma (APG), wherein said plasma is generated in a discharge space between a plurality of electrodes. A dielectric is present on at least one of said electrodes, said dielectric having a boundary surface with said plasma enabling interactions between said plasma and said surface. Said dielectric is arranged for releasing electrons contributing to said plasma from said surface by said interactions.
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