Plasma immersion ion implantation process
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United States of America Patent
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Oct 30, 2007
Grant Date -
Sep 1, 2005
app pub date -
Jan 28, 2005
filing date -
Aug 11, 2000
priority date (Note) -
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Abstract
One method of performing plasma immersion ion implantation on a workpiece in a plasma reactor chamber includes initially depositing a seasoning film on the interior surfaces of the plasma reactor chamber before the workpiece is introduced, by introducing a seasoning film precursor gas into the chamber and generating a plasma within the chamber, performing plasma immersion ion implantation on the workpiece by introducing an implant species precursor gas into the chamber and generating a plasma, and then removing the workpiece from the chamber and removing the seasoning film from the chamber interior surfaces.
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