LTCC-based modular MEMS phased array
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United States of America Patent
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Oct 30, 2007
Grant Date -
Feb 24, 2005
app pub date -
Apr 12, 2002
filing date -
Apr 13, 2001
priority date (Note) -
Expired
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Abstract
The present invention uses low temperature co-fired ceramic (LTCC) technology for fabrication of micro-electro-mechnical systems (MEMS) based phase shifters. As a result, low-cost subarray modules can be constructed using LTCC, and the subarray modules (10) can be used as building blocks for large antenna arrays. In an exemplary description of the present invention, all layers of the multilayer subarray modules, including MEMS, are in LTCC. As a result, a significant cost reduction for satellite terminals using highly integrated LTCC subarray modules.
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