Structure of a micro electro mechanical system and the manufacturing method thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7291921
APP PUB NO 20050078348A1
SERIAL NO

10810660

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A structure of a micro electro mechanical system and a manufacturing method are provided, the structure and manufacturing method is adapted for an optical interference display cell. The structure of the optical interference display cell includes a first electrode, a second electrode and posts. The second electrode comprises a conductive layer covered by a material layer and is arranged about parallel with the first electrode. The support is located between the first plate and the second plate and a cavity is formed. In the release etch process of manufacturing the structure, the material layer protects the conductive layer from the damage by an etching reagent. The material layer also protects the conductive layer from the damage from the oxygen and moisture in the air.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CENTOCOR ORTHO BIOTECH INC.HORSHAM, PA30
SNAPTRACK, INC.SAN JOSE, CA1469

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lin, Wen-Jian Hsinchu, TW 46 4226

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
SNAPTRACK, INC. (30)
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8077379 Interferometric optical display system with broadband characteristics 0 2009
8126297 MEMS device fabricated on a pre-patterned substrate 1 2010
7835093 Methods for forming layers within a MEMS device using liftoff processes 12 2010
8218229 Support structure for MEMS device and methods therefor 6 2010
8149497 Support structure for MEMS device and methods therefor 7 2010
7952789 MEMS devices with multi-component sacrificial layers 5 2010
8284475 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2010
8298847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 6 2010
8164815 MEMS cavity-coating layers and methods 4 2010
8394656 Method of creating MEMS device cavities by a non-etching process 0 2010
8928967 Method and device for modulating light 2 2010
8358458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
9110289 Device for modulating light with multiple electrodes 2 2011
8971675 Interconnect structure for MEMS device 1 2011
8300299 MEMS devices with multi-component sacrificial layers 0 2011
8830557 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2012
 
FLEX LIGHTING II, LLC (1)
9110200 Illumination device comprising a film-based lightguide 2 2011
* Cited By Examiner

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