US Patent No: 7,291,921

Number of patents in Portfolio can not be more than 2000

Structure of a micro electro mechanical system and the manufacturing method thereof

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ALSO PUBLISHED AS: 20050078348
ATTORNEY / AGENT: (SPONSORED)
 

Importance

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Abstract

A structure of a micro electro mechanical system and a manufacturing method are provided, the structure and manufacturing method is adapted for an optical interference display cell. The structure of the optical interference display cell includes a first electrode, a second electrode and posts. The second electrode comprises a conductive layer covered by a material layer and is arranged about parallel with the first electrode. The support is located between the first plate and the second plate and a cavity is formed. In the release etch process of manufacturing the structure, the material layer protects the conductive layer from the damage by an etching reagent. The material layer also protects the conductive layer from the damage from the oxygen and moisture in the air.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lin, Wen-Jian Hsinchu, TW 52 3614

Cited Art

Patent Info (Count) # Cites Year
 
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4,441,791 Deformable mirror light modulator 588 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 208 1982
4,571,603 Deformable mirror electrostatic printer 348 1984
4,566,935 Spatial light modulator and method 477 1984
4,710,732 Spatial light modulator and method 468 1984
4,596,992 Linear spatial light modulator and printer 361 1984
4,615,595 Frame addressed spatial light modulator 377 1984
4,662,746 Spatial light modulator and method 471 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 272 1988
4,956,619 Spatial light modulator 553 1988
5,079,544 Standard independent digitized video system 334 1989
5,028,939 Spatial light modulator system 369 1989
4,954,789 Spatial light modulator 524 1989
5,037,173 Optical interconnection network 302 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 291 1990
5,083,857 Multi-level deformable mirror device 514 1990
5,142,405 Bistable DMD addressing circuit and method 321 1990
5,061,049 Spatial light modulator and method 703 1990
5,192,395 Method of making a digital flexure beam accelerometer 194 1990
5,096,279 Spatial light modulator and method 474 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 305 1991
5,226,099 Digital micromirror shutter device 350 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 240 1991
5,170,156 Multi-frequency two dimensional display system 244 1991
5,192,946 Digitized color video display system 307 1991
5,214,419 Planarized true three dimensional display 248 1991
5,214,420 Spatial light modulator projection system with random polarity light 285 1991
5,206,629 Spatial light modulator and memory for digitized video display 241 1991
5,179,274 Method for controlling operation of optical systems and devices 222 1991
5,168,406 Color deformable mirror device and method for manufacture 269 1991
5,254,980 DMD display system controller 232 1991
5,563,398 Spatial light modulator scanning system 190 1991
5,233,385 White light enhanced color field sequential projection 347 1991
5,233,456 Resonant mirror and method of manufacture 291 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 364 1992
5,331,454 Low reset voltage process for DMD 337 1992
5,296,950 Optical signal free-space conversion board 220 1992
5,231,532 Switchable resonant filter for optical radiation 233 1992
5,212,582 Electrostatically controlled beam steering device and method 336 1992
5,312,513 Methods of forming multiple phase light modulators 261 1992
5,172,262 Spatial light modulator and method 374 1992
5,305,640 Digital flexure beam accelerometer 178 1992
5,446,479 Multi-dimensional array video processor system 243 1992
5,818,095 High-yield spatial light modulator with light blocking layer 287 1992
5,272,473 Reduced-speckle display system 265 1992
5,327,286 Real time optical correlation system 262 1992
5,287,096 Variable luminosity display system 259 1992
5,325,116 Device for writing to and reading from optical storage media 246 1992
5,280,277 Field updated deformable mirror device 310 1992
5,506,597 Apparatus and method for image projection 274 1992
5,457,566 DMD scanner 233 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 333 1993
5,461,411 Process and architecture for digital micromirror printer 282 1993
5,323,002 Spatial light modulator based optical calibration system 259 1993
5,489,952 Method and device for multi-format television 308 1993
5,365,283 Color phase control for projection display using spatial light modulator 272 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 381 1993
5,581,272 Signal generator for controlling a spatial light modulator 186 1993
5,457,493 Digital micro-mirror based image simulation system 288 1993
5,411,769 Method of producing micromechanical devices 251 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 270 1993
5,526,051 Digital television system 239 1993
5,459,602 Micro-mechanical optical shutter 209 1993
5,452,024 DMD display system 389 1993
5,497,197 System and method for packaging data into video processor 223 1993
5,517,347 Direct view deformable mirror device 283 1993
5,583,688 Multi-level digital micromirror device 441 1993
5,448,314 Method and apparatus for sequential color imaging 392 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 265 1994
5,606,441 Multiple phase light modulation using binary addressing 210 1994
5,444,566 Optimized electronic operation of digital micromirror devices 345 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 284 1994
5,526,688 Digital flexure beam accelerometer and method 198 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 265 1994
6,061,075 Non-systolic time delay and integration printing 174 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 291 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 272 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 250 1994
5,548,301 Pixel control circuitry for spatial light modulator 233 1994
5,650,881 Support post architecture for micromechanical devices 250 1994
5,552,924 Micromechanical device having an improved beam 237 1994
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5,659,374 Method of repairing defective pixels 197 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 230 1995
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5,515,076 Multi-dimensional array video processor system 239 1995
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5,619,366 Controllable surface filter 218 1995
5,551,293 Micro-machined accelerometer array with shield plane 208 1995
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5,589,852 Apparatus and method for image projection with pixel intensity control 261 1995
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5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 380 1995
5,608,468 Method and device for multi-format television 231 1995
5,610,625 Monolithic spatial light modulator and memory package 176 1995
5,646,768 Support posts for micro-mechanical devices 288 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 205 1995
6,099,132 Manufacture method for micromechanical devices 200 1995
6,447,126 Support post architecture for micromechanical devices 317 1995
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5,654,741 Spatial light modulator display pointing device 184 1995
5,784,212 Method of making a support post for a micromechanical device 225 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 267 1996
5,842,088 Method of calibrating a spatial light modulator printing system 244 1997
5,808,780 Non-contacting micromechanical optical switch 222 1997
5,912,758 Bipolar reset for spatial light modulators 195 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 183 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 276 1998
6,282,010 Anti-reflective coatings for spatial light modulators 270 1999
6,323,982 Yield superstructure for digital micromirror device 252 1999
6,295,154 Optical switching apparatus 284 1999
6,147,790 Spring-ring micromechanical device 230 1999
6,038,056 Spatial light modulator having improved contrast ratio 252 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 182 2000
6,635,919 High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications 111 2000
6,376,787 Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer 143 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 202 2000
6,552,840 Electrostatic efficiency of micromechanical devices 228 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 204 2000
6,657,832 Mechanically assisted restoring force support for micromachined membranes 173 2001
6,778,155 Display operation with inserted block clears 172 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 209 2001
6,775,174 Memory architecture for micromirror cell 173 2001
6,625,047 Micromechanical memory element 238 2001
6,741,503 SLM display data address mapping for four bank frame buffer 172 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (32)
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6,040,937 Interferometric modulation 571 1996
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6,055,090 Interferometric modulation 423 1999
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6,650,455 Photonic mems and structures 453 2001
2002/0075,555 Interferometric modulation of radiation 387 2001
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6,710,908 Controlling micro-electro-mechanical cavities 306 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 398 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 249 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 272 2002
6,747,800 Optical interference type panel and the manufacturing method thereof 143 2003
6,912,022 Optical interference color display and optical interference modulator 226 2003
6,982,820 Color changeable pixel 144 2003
6,995,890 Interference display unit 122 2003
2004/0209,195 Method for fabricating an interference display unit 209 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 188 2003
6,882,458 Structure of an optical interference display cell 228 2003
2004/0240,032 Interferometric modulation of radiation 290 2004
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6,958,847 Structure of an optical interference display unit 198 2004
6,999,225 Optical interference display panel 112 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 190 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 218 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 215 2004
6,952,303 Interferometric modulation pixels and manufacturing method thereof 187 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 132 2004
2005/0195,462 Interference display plate and manufacturing method thereof 226 2004
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HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
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6,859,218 Electronic display devices and methods 174 2000
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6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 257 2001
2003/0202,264 Micro-mirror device 193 2002
6,747,785 MEMS-actuated color light modulator and methods 206 2002
6,666,561 Continuously variable analog micro-mirror device 212 2002
2004/0147,056 Micro-fabricated device and method of making 179 2003
6,829,132 Charge control of micro-electromechanical device 200 2003
6,811,267 Display system with nonvisible data projection 209 2003
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2005/0068,583 Organizing a digital image 169 2003
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LUCENT TECHNOLOGIES INC. (8)
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SONY CORPORATION (7)
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5,136,669 Variable ratio fiber optic coupler optical signal processing element 129 1991
 
SUMITOMO CHEMICAL COMPANY, LIMITED (1)
5,503,952 Method for manufacture of color filter and liquid crystal display 57 1995
 
TECHBANK CORPORATION (1)
6,736,987 Silicon etching apparatus using XeF2 46 2000
 
THE REGENTS OF THE UNIVERSITY OF COLORADO (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 225 1991
 
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY (1)
4,228,437 Wideband polarization-transforming electromagnetic mirror 165 1979
 
TOPPOLY OPTOELECTRONICS CORP. (1)
5,976,902 Method of fabricating a fully self-aligned TFT-LCD 75 1998
 
VENTURE LENDING & LEASING IV, INC. (1)
2001/0040,675 Method for forming a micromechanical device 82 2001
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (9)
4,445,050 Device for conversion of light power to electric power 178 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 170 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 255 1991
5,228,013 Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays 132 1992
5,526,327 Spatial displacement time display 133 1994
5,500,635 Products incorporating piezoelectric material 262 1994
5,641,391 Three dimensional microfabrication by localized electrodeposition and etching 137 1995
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 229 2003
2005/0001,828 Charge control of micro-electromechanical device 170 2004

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (24)
7,630,114 Diffusion barrier layer for MEMS devices 1 2005
7,706,044 Optical interference display cell and method of making the same 8 2006
7,660,058 Methods for etching layers within a MEMS device to achieve a tapered edge 3 2006
7,580,172 MEMS device and interconnects for same 4 2006
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 2 2008
7,688,494 Electrode and interconnect materials for MEMS devices 10 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 1 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
8,115,988 System and method for micro-electromechanical operation of an interferometric modulator 0 2008
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 0 2009
8,077,379 Interferometric optical display system with broadband characteristics 0 2009
8,126,297 MEMS device fabricated on a pre-patterned substrate 0 2010
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 4 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,952,789 MEMS devices with multi-component sacrificial layers 4 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,300,299 MEMS devices with multi-component sacrificial layers 0 2011
 
QUALCOMM INCORPORATED (1)
7,709,964 Structure of a micro electro mechanical system and the manufacturing method thereof 5 2007

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