US Patent No: 7,291,921

Number of patents in Portfolio can not be more than 2000

Structure of a micro electro mechanical system and the manufacturing method thereof

ALSO PUBLISHED AS: 20050078348

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Abstract

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A structure of a micro electro mechanical system and a manufacturing method are provided, the structure and manufacturing method is adapted for an optical interference display cell. The structure of the optical interference display cell includes a first electrode, a second electrode and posts. The second electrode comprises a conductive layer covered by a material layer and is arranged about parallel with the first electrode. The support is located between the first plate and the second plate and a cavity is formed. In the release etch process of manufacturing the structure, the material layer protects the conductive layer from the damage by an etching reagent. The material layer also protects the conductive layer from the damage from the oxygen and moisture in the air.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CENTOCOR ORTHO BIOTECH INC.HORSHAM, PA31

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lin, Wen-Jian Hsinchu, TW 52 3860

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (129)
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4,441,791 Deformable mirror light modulator 621 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 221 1982
4,571,603 Deformable mirror electrostatic printer 362 1984
4,566,935 Spatial light modulator and method 508 1984
4,710,732 Spatial light modulator and method 487 1984
4,596,992 Linear spatial light modulator and printer 391 1984
4,615,595 Frame addressed spatial light modulator 393 1984
4,662,746 Spatial light modulator and method 491 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 281 1988
4,956,619 Spatial light modulator 577 1988
5,079,544 Standard independent digitized video system 345 1989
5,028,939 Spatial light modulator system 390 1989
4,954,789 Spatial light modulator 563 1989
5,037,173 Optical interconnection network 316 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 299 1990
5,083,857 Multi-level deformable mirror device 530 1990
5,142,405 Bistable DMD addressing circuit and method 337 1990
5,061,049 Spatial light modulator and method 730 1990
5,192,395 Method of making a digital flexure beam accelerometer 203 1990
5,096,279 Spatial light modulator and method 506 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 314 1991
5,226,099 Digital micromirror shutter device 364 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 248 1991
5,170,156 Multi-frequency two dimensional display system 253 1991
5,192,946 Digitized color video display system 322 1991
5,214,419 Planarized true three dimensional display 256 1991
5,214,420 Spatial light modulator projection system with random polarity light 297 1991
5,206,629 Spatial light modulator and memory for digitized video display 249 1991
5,179,274 Method for controlling operation of optical systems and devices 230 1991
5,168,406 Color deformable mirror device and method for manufacture 280 1991
5,254,980 DMD display system controller 240 1991
5,563,398 Spatial light modulator scanning system 201 1991
5,233,385 White light enhanced color field sequential projection 372 1991
5,233,456 Resonant mirror and method of manufacture 302 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 378 1992
5,331,454 Low reset voltage process for DMD 346 1992
5,296,950 Optical signal free-space conversion board 228 1992
5,231,532 Switchable resonant filter for optical radiation 243 1992
5,212,582 Electrostatically controlled beam steering device and method 344 1992
5,312,513 Methods of forming multiple phase light modulators 275 1992
5,172,262 Spatial light modulator and method 386 1992
5,305,640 Digital flexure beam accelerometer 189 1992
5,446,479 Multi-dimensional array video processor system 251 1992
5,818,095 High-yield spatial light modulator with light blocking layer 307 1992
5,272,473 Reduced-speckle display system 286 1992
5,327,286 Real time optical correlation system 273 1992
5,287,096 Variable luminosity display system 270 1992
5,325,116 Device for writing to and reading from optical storage media 254 1992
5,280,277 Field updated deformable mirror device 331 1992
5,506,597 Apparatus and method for image projection 283 1992
5,457,566 DMD scanner 241 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 349 1993
5,461,411 Process and architecture for digital micromirror printer 298 1993
5,323,002 Spatial light modulator based optical calibration system 275 1993
5,489,952 Method and device for multi-format television 330 1993
5,365,283 Color phase control for projection display using spatial light modulator 283 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 405 1993
5,581,272 Signal generator for controlling a spatial light modulator 196 1993
5,457,493 Digital micro-mirror based image simulation system 323 1993
5,411,769 Method of producing micromechanical devices 261 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 288 1993
5,526,051 Digital television system 263 1993
5,459,602 Micro-mechanical optical shutter 217 1993
5,452,024 DMD display system 420 1993
5,497,197 System and method for packaging data into video processor 232 1993
5,517,347 Direct view deformable mirror device 302 1993
5,583,688 Multi-level digital micromirror device 465 1993
5,448,314 Method and apparatus for sequential color imaging 409 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 275 1994
5,606,441 Multiple phase light modulation using binary addressing 221 1994
5,444,566 Optimized electronic operation of digital micromirror devices 358 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 300 1994
5,526,688 Digital flexure beam accelerometer and method 209 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 281 1994
6,061,075 Non-systolic time delay and integration printing 182 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 309 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 281 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 261 1994
5,548,301 Pixel control circuitry for spatial light modulator 250 1994
5,650,881 Support post architecture for micromechanical devices 261 1994
5,552,924 Micromechanical device having an improved beam 246 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 202 1994
5,659,374 Method of repairing defective pixels 206 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 241 1995
6,049,317 System for imaging of light-sensitive media 252 1995
5,610,438 Micro-mechanical device with non-evaporable getter 295 1995
5,515,076 Multi-dimensional array video processor system 247 1995
6,232,936 DMD Architecture to improve horizontal resolution 212 1995
5,535,047 Active yoke hidden hinge digital micromirror device 463 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 235 1995
5,619,366 Controllable surface filter 230 1995
5,551,293 Micro-machined accelerometer array with shield plane 221 1995
5,570,135 Method and device for multi-format television 227 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 276 1995
5,597,736 High-yield spatial light modulator with light blocking layer 248 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 404 1995
5,608,468 Method and device for multi-format television 248 1995
5,610,625 Monolithic spatial light modulator and memory package 185 1995
5,646,768 Support posts for micro-mechanical devices 304 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 221 1995
6,099,132 Manufacture method for micromechanical devices 208 1995
6,447,126 Support post architecture for micromechanical devices 327 1995
5,657,099 Color phase control for projection display using spatial light modulator 208 1995
5,654,741 Spatial light modulator display pointing device 193 1995
5,784,212 Method of making a support post for a micromechanical device 235 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 286 1996
5,842,088 Method of calibrating a spatial light modulator printing system 257 1997
5,808,780 Non-contacting micromechanical optical switch 230 1997
5,912,758 Bipolar reset for spatial light modulators 205 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 193 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 289 1998
6,282,010 Anti-reflective coatings for spatial light modulators 289 1999
6,323,982 Yield superstructure for digital micromirror device 263 1999
6,295,154 Optical switching apparatus 298 1999
6,147,790 Spring-ring micromechanical device 240 1999
6,038,056 Spatial light modulator having improved contrast ratio 263 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 193 2000
6,635,919 High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications 118 2000
6,376,787 Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer 154 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 212 2000
6,552,840 Electrostatic efficiency of micromechanical devices 236 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 214 2000
6,657,832 Mechanically assisted restoring force support for micromachined membranes 185 2001
6,778,155 Display operation with inserted block clears 182 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 221 2001
6,775,174 Memory architecture for micromirror cell 181 2001
6,625,047 Micromechanical memory element 255 2001
6,741,503 SLM display data address mapping for four bank frame buffer 181 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (33)
5,835,255 Visible spectrum modulator arrays 506 1994
6,040,937 Interferometric modulation 637 1996
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6,674,562 Interferometric modulation of radiation 676 1998
6,055,090 Interferometric modulation 452 1999
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6,867,896 Interferometric modulation of radiation 396 2001
6,680,792 Interferometric modulation of radiation 512 2001
6,650,455 Photonic mems and structures 508 2001
2002/0075,555 Interferometric modulation of radiation 419 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 390 2002
6,710,908 Controlling micro-electro-mechanical cavities 345 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 455 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 283 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 286 2002
6,747,800 Optical interference type panel and the manufacturing method thereof 148 2003
6,912,022 Optical interference color display and optical interference modulator 242 2003
6,982,820 Color changeable pixel 157 2003
6,995,890 Interference display unit 129 2003
2004/0209,195 Method for fabricating an interference display unit 222 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 199 2003
6,882,458 Structure of an optical interference display cell 242 2003
2004/0240,032 Interferometric modulation of radiation 305 2004
6,999,236 Optical-interference type reflective panel and method for making the same 92 2004
6,958,847 Structure of an optical interference display unit 209 2004
6,999,225 Optical interference display panel 122 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 206 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 232 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 228 2004
6,952,303 Interferometric modulation pixels and manufacturing method thereof 198 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 143 2004
2005/0195,462 Interference display plate and manufacturing method thereof 240 2004
2006/0066,932 Method of selective etching using etch stop layer 70 2005
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 196 1999
6,859,218 Electronic display devices and methods 182 2000
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 209 2001
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 274 2001
2003/0202,264 Micro-mirror device 202 2002
6,747,785 MEMS-actuated color light modulator and methods 215 2002
6,666,561 Continuously variable analog micro-mirror device 229 2002
2004/0147,056 Micro-fabricated device and method of making 191 2003
6,829,132 Charge control of micro-electromechanical device 211 2003
6,811,267 Display system with nonvisible data projection 225 2003
2005/0057,442 Adjacent display of sequential sub-images 204 2003
2005/0068,583 Organizing a digital image 178 2003
2004/0212,026 MEMS device having time-varying control 179 2004
 
LUCENT TECHNOLOGIES INC. (8)
5,636,052 Direct view display based on a micromechanical modulation 307 1994
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5,838,484 Micromechanical optical modulator with linear operating characteristic 194 1996
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6,351,329 Optical attenuator 113 1999
6,522,801 Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor 72 2000
2003/0138,213 Optical systems comprising curved MEMs mirrors and methods for making same 57 2002
 
SONY CORPORATION (7)
5,355,357 Disc player and disc loading device 172 1992
6,760,146 Light modulation element, GLV device, and laser display 45 2002
7,016,099 MEMS element, GLV device, and laser display 42 2002
7,116,462 Electrostatic drive type MEMS device and manufacturing method thereof, optical MEMS device, light modulation device, GLV device, and laser display 8 2002
7,102,808 MEMS device and methods for manufacturing thereof, light modulation device, GLV device and methods for manufacturing thereof, and laser display 7 2003
6,838,304 MEMS element manufacturing method 7 2003
6,946,315 Manufacturing methods of MEMS device 4 2004
 
CANON KABUSHIKI KAISHA (6)
5,633,652 Method for driving optical modulation device 137 1995
6,100,872 Display control method and apparatus 180 1997
6,513,911 Micro-electromechanical device, liquid discharge head, and method of manufacture therefor 85 2000
6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 192 2001
6,822,628 Methods and systems for compensating row-to-row brightness variations of a field emission display 191 2001
6,853,129 Protected substrate structure for a field emission display device 186 2003
 
U.S. Philips Corporation (5)
4,403,248 Display device with deformable reflective medium 343 1981
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4,459,182 Method of manufacturing a display device 244 1983
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6,160,833 Blue vertical cavity surface emitting laser 204 1998
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6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 193 1999
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EASTMAN KODAK COMPANY (4)
5,075,796 Optical article for multicolor imaging 203 1990
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FUJI PHOTO FILM CO., LTD. (4)
6,356,254 Array-type light modulating device and method of operating flat display unit 133 1999
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6,642,913 Light modulation element, exposure unit, and flat-panel display unit 136 2000
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (4)
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 350 1989
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SANDIA CORPORATION (4)
5,345,328 Tandem resonator reflectance modulator 147 1992
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Honeywell Inc. (3)
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MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (3)
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2004/0175,577 Structure of a light-incidence electrode of an optical interference display plate 208 2003
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5,683,591 Process for producing surface micromechanical structures 193 1995
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THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,311,360 Method and apparatus for modulating a light beam 574 1992
5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 305 1993
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (2)
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Techbank Corporation (1)
6,736,987 Silicon etching apparatus using XeF2 49 2000
 
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 232 1991
 
The United States of America as represented by the Secretary of the Navy (1)
4,228,437 Wideband polarization-transforming electromagnetic mirror 174 1979
 
TOPPOLY OPTOELECTRONICS CORP. (1)
5,976,902 Method of fabricating a fully self-aligned TFT-LCD 77 1998
 
VENTURE LENDING & LEASING IV, INC. (1)
2001/0040,675 Method for forming a micromechanical device 85 2001
 
Other [Check patent profile for assignment information] (9)
4,445,050 Device for conversion of light power to electric power 191 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 178 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 269 1991
5,228,013 Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays 136 1992
5,526,327 Spatial displacement time display 139 1994
5,500,635 Products incorporating piezoelectric material 289 1994
5,641,391 Three dimensional microfabrication by localized electrodeposition and etching 148 1995
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 244 2003
2005/0001,828 Charge control of micro-electromechanical device 179 2004

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (25)
7,630,114 Diffusion barrier layer for MEMS devices 3 2005
7,706,044 Optical interference display cell and method of making the same 9 2006
7,660,058 Methods for etching layers within a MEMS device to achieve a tapered edge 8 2006
7,580,172 MEMS device and interconnects for same 5 2006
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 4 2008
7,688,494 Electrode and interconnect materials for MEMS devices 13 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 3 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
8,115,988 System and method for micro-electromechanical operation of an interferometric modulator 0 2008
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 0 2009
8,077,379 Interferometric optical display system with broadband characteristics 0 2009
8,126,297 MEMS device fabricated on a pre-patterned substrate 1 2010
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 6 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,952,789 MEMS devices with multi-component sacrificial layers 5 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,300,299 MEMS devices with multi-component sacrificial layers 0 2011
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
 
QUALCOMM INCORPORATED (1)
7,709,964 Structure of a micro electro mechanical system and the manufacturing method thereof 7 2007

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