US Patent No: 7,291,921

Number of patents in Portfolio can not be more than 2000

Structure of a micro electro mechanical system and the manufacturing method thereof

ALSO PUBLISHED AS: 20050078348
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Abstract

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A structure of a micro electro mechanical system and a manufacturing method are provided, the structure and manufacturing method is adapted for an optical interference display cell. The structure of the optical interference display cell includes a first electrode, a second electrode and posts. The second electrode comprises a conductive layer covered by a material layer and is arranged about parallel with the first electrode. The support is located between the first plate and the second plate and a cavity is formed. In the release etch process of manufacturing the structure, the material layer protects the conductive layer from the damage by an etching reagent. The material layer also protects the conductive layer from the damage from the oxygen and moisture in the air.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CENTOCOR ORTHO BIOTECH INC.HORSHAM, PA31

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lin, Wen-Jian Hsinchu, TW 52 3841

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (129)
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4,441,791 Deformable mirror light modulator 619 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 220 1982
4,571,603 Deformable mirror electrostatic printer 359 1984
4,566,935 Spatial light modulator and method 505 1984
4,710,732 Spatial light modulator and method 486 1984
4,596,992 Linear spatial light modulator and printer 387 1984
4,615,595 Frame addressed spatial light modulator 392 1984
4,662,746 Spatial light modulator and method 490 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 280 1988
4,956,619 Spatial light modulator 576 1988
5,079,544 Standard independent digitized video system 344 1989
5,028,939 Spatial light modulator system 389 1989
4,954,789 Spatial light modulator 561 1989
5,037,173 Optical interconnection network 315 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 298 1990
5,083,857 Multi-level deformable mirror device 529 1990
5,142,405 Bistable DMD addressing circuit and method 336 1990
5,061,049 Spatial light modulator and method 728 1990
5,192,395 Method of making a digital flexure beam accelerometer 202 1990
5,096,279 Spatial light modulator and method 505 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 313 1991
5,226,099 Digital micromirror shutter device 363 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 247 1991
5,170,156 Multi-frequency two dimensional display system 252 1991
5,192,946 Digitized color video display system 320 1991
5,214,419 Planarized true three dimensional display 255 1991
5,214,420 Spatial light modulator projection system with random polarity light 296 1991
5,206,629 Spatial light modulator and memory for digitized video display 248 1991
5,179,274 Method for controlling operation of optical systems and devices 229 1991
5,168,406 Color deformable mirror device and method for manufacture 278 1991
5,254,980 DMD display system controller 239 1991
5,563,398 Spatial light modulator scanning system 200 1991
5,233,385 White light enhanced color field sequential projection 370 1991
5,233,456 Resonant mirror and method of manufacture 301 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 377 1992
5,331,454 Low reset voltage process for DMD 344 1992
5,296,950 Optical signal free-space conversion board 227 1992
5,231,532 Switchable resonant filter for optical radiation 242 1992
5,212,582 Electrostatically controlled beam steering device and method 344 1992
5,312,513 Methods of forming multiple phase light modulators 274 1992
5,172,262 Spatial light modulator and method 385 1992
5,305,640 Digital flexure beam accelerometer 188 1992
5,446,479 Multi-dimensional array video processor system 250 1992
5,818,095 High-yield spatial light modulator with light blocking layer 304 1992
5,272,473 Reduced-speckle display system 285 1992
5,327,286 Real time optical correlation system 272 1992
5,287,096 Variable luminosity display system 269 1992
5,325,116 Device for writing to and reading from optical storage media 253 1992
5,280,277 Field updated deformable mirror device 330 1992
5,506,597 Apparatus and method for image projection 282 1992
5,457,566 DMD scanner 240 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 348 1993
5,461,411 Process and architecture for digital micromirror printer 297 1993
5,323,002 Spatial light modulator based optical calibration system 274 1993
5,489,952 Method and device for multi-format television 329 1993
5,365,283 Color phase control for projection display using spatial light modulator 281 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 403 1993
5,581,272 Signal generator for controlling a spatial light modulator 195 1993
5,457,493 Digital micro-mirror based image simulation system 320 1993
5,411,769 Method of producing micromechanical devices 260 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 287 1993
5,526,051 Digital television system 262 1993
5,459,602 Micro-mechanical optical shutter 216 1993
5,452,024 DMD display system 418 1993
5,497,197 System and method for packaging data into video processor 231 1993
5,517,347 Direct view deformable mirror device 300 1993
5,583,688 Multi-level digital micromirror device 463 1993
5,448,314 Method and apparatus for sequential color imaging 407 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 274 1994
5,606,441 Multiple phase light modulation using binary addressing 219 1994
5,444,566 Optimized electronic operation of digital micromirror devices 357 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 299 1994
5,526,688 Digital flexure beam accelerometer and method 208 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 280 1994
6,061,075 Non-systolic time delay and integration printing 181 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 308 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 280 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 260 1994
5,548,301 Pixel control circuitry for spatial light modulator 249 1994
5,650,881 Support post architecture for micromechanical devices 260 1994
5,552,924 Micromechanical device having an improved beam 245 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 201 1994
5,659,374 Method of repairing defective pixels 205 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 240 1995
6,049,317 System for imaging of light-sensitive media 250 1995
5,610,438 Micro-mechanical device with non-evaporable getter 293 1995
5,515,076 Multi-dimensional array video processor system 246 1995
6,232,936 DMD Architecture to improve horizontal resolution 211 1995
5,535,047 Active yoke hidden hinge digital micromirror device 461 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 233 1995
5,619,366 Controllable surface filter 228 1995
5,551,293 Micro-machined accelerometer array with shield plane 220 1995
5,570,135 Method and device for multi-format television 226 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 273 1995
5,597,736 High-yield spatial light modulator with light blocking layer 247 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 403 1995
5,608,468 Method and device for multi-format television 247 1995
5,610,625 Monolithic spatial light modulator and memory package 184 1995
5,646,768 Support posts for micro-mechanical devices 303 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 220 1995
6,099,132 Manufacture method for micromechanical devices 207 1995
6,447,126 Support post architecture for micromechanical devices 326 1995
5,657,099 Color phase control for projection display using spatial light modulator 207 1995
5,654,741 Spatial light modulator display pointing device 191 1995
5,784,212 Method of making a support post for a micromechanical device 234 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 285 1996
5,842,088 Method of calibrating a spatial light modulator printing system 256 1997
5,808,780 Non-contacting micromechanical optical switch 230 1997
5,912,758 Bipolar reset for spatial light modulators 204 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 192 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 287 1998
6,282,010 Anti-reflective coatings for spatial light modulators 286 1999
6,323,982 Yield superstructure for digital micromirror device 262 1999
6,295,154 Optical switching apparatus 297 1999
6,147,790 Spring-ring micromechanical device 239 1999
6,038,056 Spatial light modulator having improved contrast ratio 262 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 192 2000
6,635,919 High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications 118 2000
6,376,787 Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer 153 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 210 2000
6,552,840 Electrostatic efficiency of micromechanical devices 235 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 212 2000
6,657,832 Mechanically assisted restoring force support for micromachined membranes 185 2001
6,778,155 Display operation with inserted block clears 181 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 219 2001
6,775,174 Memory architecture for micromirror cell 180 2001
6,625,047 Micromechanical memory element 253 2001
6,741,503 SLM display data address mapping for four bank frame buffer 180 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (33)
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6,680,792 Interferometric modulation of radiation 507 2001
6,650,455 Photonic mems and structures 502 2001
2002/0075,555 Interferometric modulation of radiation 416 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 385 2002
6,710,908 Controlling micro-electro-mechanical cavities 342 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 449 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 279 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 285 2002
6,747,800 Optical interference type panel and the manufacturing method thereof 148 2003
6,912,022 Optical interference color display and optical interference modulator 241 2003
6,982,820 Color changeable pixel 156 2003
6,995,890 Interference display unit 128 2003
2004/0209,195 Method for fabricating an interference display unit 221 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 199 2003
6,882,458 Structure of an optical interference display cell 241 2003
2004/0240,032 Interferometric modulation of radiation 303 2004
6,999,236 Optical-interference type reflective panel and method for making the same 91 2004
6,958,847 Structure of an optical interference display unit 209 2004
6,999,225 Optical interference display panel 120 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 205 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 231 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 228 2004
6,952,303 Interferometric modulation pixels and manufacturing method thereof 198 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 143 2004
2005/0195,462 Interference display plate and manufacturing method thereof 239 2004
2006/0066,932 Method of selective etching using etch stop layer 70 2005
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 194 1999
6,859,218 Electronic display devices and methods 181 2000
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6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 272 2001
2003/0202,264 Micro-mirror device 201 2002
6,747,785 MEMS-actuated color light modulator and methods 213 2002
6,666,561 Continuously variable analog micro-mirror device 228 2002
2004/0147,056 Micro-fabricated device and method of making 190 2003
6,829,132 Charge control of micro-electromechanical device 210 2003
6,811,267 Display system with nonvisible data projection 221 2003
2005/0057,442 Adjacent display of sequential sub-images 202 2003
2005/0068,583 Organizing a digital image 177 2003
2004/0212,026 MEMS device having time-varying control 178 2004
 
LUCENT TECHNOLOGIES INC. (8)
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6,351,329 Optical attenuator 112 1999
6,522,801 Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor 72 2000
2003/0138,213 Optical systems comprising curved MEMs mirrors and methods for making same 57 2002
 
SONY CORPORATION (7)
5,355,357 Disc player and disc loading device 172 1992
6,760,146 Light modulation element, GLV device, and laser display 44 2002
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7,116,462 Electrostatic drive type MEMS device and manufacturing method thereof, optical MEMS device, light modulation device, GLV device, and laser display 8 2002
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6,838,304 MEMS element manufacturing method 6 2003
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CANON KABUSHIKI KAISHA (6)
5,633,652 Method for driving optical modulation device 137 1995
6,100,872 Display control method and apparatus 180 1997
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6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 190 2001
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6,853,129 Protected substrate structure for a field emission display device 184 2003
 
U.S. Philips Corporation (5)
4,403,248 Display device with deformable reflective medium 341 1981
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6,160,833 Blue vertical cavity surface emitting laser 203 1998
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EASTMAN KODAK COMPANY (4)
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FUJI PHOTO FILM CO., LTD. (4)
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MASSACHUSETTS INSTITUTE OF TECHNOLOGY (4)
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2004/0175,577 Structure of a light-incidence electrode of an optical interference display plate 207 2003
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THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,311,360 Method and apparatus for modulating a light beam 570 1992
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Techbank Corporation (1)
6,736,987 Silicon etching apparatus using XeF2 49 2000
 
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 231 1991
 
The United States of America as represented by the Secretary of the Navy (1)
4,228,437 Wideband polarization-transforming electromagnetic mirror 173 1979
 
TOPPOLY OPTOELECTRONICS CORP. (1)
5,976,902 Method of fabricating a fully self-aligned TFT-LCD 77 1998
 
VENTURE LENDING & LEASING IV, INC. (1)
2001/0040,675 Method for forming a micromechanical device 85 2001
 
Other [Check patent profile for assignment information] (9)
4,445,050 Device for conversion of light power to electric power 188 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 177 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 267 1991
5,228,013 Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays 135 1992
5,526,327 Spatial displacement time display 139 1994
5,500,635 Products incorporating piezoelectric material 286 1994
5,641,391 Three dimensional microfabrication by localized electrodeposition and etching 148 1995
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 241 2003
2005/0001,828 Charge control of micro-electromechanical device 178 2004

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (25)
7,630,114 Diffusion barrier layer for MEMS devices 3 2005
7,706,044 Optical interference display cell and method of making the same 9 2006
7,660,058 Methods for etching layers within a MEMS device to achieve a tapered edge 8 2006
7,580,172 MEMS device and interconnects for same 5 2006
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 4 2008
7,688,494 Electrode and interconnect materials for MEMS devices 12 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 3 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
8,115,988 System and method for micro-electromechanical operation of an interferometric modulator 0 2008
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 0 2009
8,077,379 Interferometric optical display system with broadband characteristics 0 2009
8,126,297 MEMS device fabricated on a pre-patterned substrate 1 2010
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 6 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,952,789 MEMS devices with multi-component sacrificial layers 5 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,300,299 MEMS devices with multi-component sacrificial layers 0 2011
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
 
QUALCOMM INCORPORATED (1)
7,709,964 Structure of a micro electro mechanical system and the manufacturing method thereof 7 2007

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