US Patent No: 7,291,921

Number of patents in Portfolio can not be more than 2000

Structure of a micro electro mechanical system and the manufacturing method thereof

ALSO PUBLISHED AS: 20050078348

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Abstract

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A structure of a micro electro mechanical system and a manufacturing method are provided, the structure and manufacturing method is adapted for an optical interference display cell. The structure of the optical interference display cell includes a first electrode, a second electrode and posts. The second electrode comprises a conductive layer covered by a material layer and is arranged about parallel with the first electrode. The support is located between the first plate and the second plate and a cavity is formed. In the release etch process of manufacturing the structure, the material layer protects the conductive layer from the damage by an etching reagent. The material layer also protects the conductive layer from the damage from the oxygen and moisture in the air.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CENTOCOR ORTHO BIOTECH INC.HORSHAM, PA31

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lin, Wen-Jian Hsinchu, TW 52 3748

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (129)
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4,441,791 Deformable mirror light modulator 611 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 217 1982
4,571,603 Deformable mirror electrostatic printer 356 1984
4,566,935 Spatial light modulator and method 500 1984
4,710,732 Spatial light modulator and method 481 1984
4,596,992 Linear spatial light modulator and printer 381 1984
4,615,595 Frame addressed spatial light modulator 388 1984
4,662,746 Spatial light modulator and method 486 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 277 1988
4,956,619 Spatial light modulator 570 1988
5,079,544 Standard independent digitized video system 340 1989
5,028,939 Spatial light modulator system 383 1989
4,954,789 Spatial light modulator 554 1989
5,037,173 Optical interconnection network 311 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 295 1990
5,083,857 Multi-level deformable mirror device 525 1990
5,142,405 Bistable DMD addressing circuit and method 333 1990
5,061,049 Spatial light modulator and method 725 1990
5,192,395 Method of making a digital flexure beam accelerometer 199 1990
5,096,279 Spatial light modulator and method 500 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 310 1991
5,226,099 Digital micromirror shutter device 358 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 244 1991
5,170,156 Multi-frequency two dimensional display system 249 1991
5,192,946 Digitized color video display system 315 1991
5,214,419 Planarized true three dimensional display 252 1991
5,214,420 Spatial light modulator projection system with random polarity light 292 1991
5,206,629 Spatial light modulator and memory for digitized video display 245 1991
5,179,274 Method for controlling operation of optical systems and devices 226 1991
5,168,406 Color deformable mirror device and method for manufacture 274 1991
5,254,980 DMD display system controller 236 1991
5,563,398 Spatial light modulator scanning system 196 1991
5,233,385 White light enhanced color field sequential projection 365 1991
5,233,456 Resonant mirror and method of manufacture 298 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 374 1992
5,331,454 Low reset voltage process for DMD 341 1992
5,296,950 Optical signal free-space conversion board 224 1992
5,231,532 Switchable resonant filter for optical radiation 238 1992
5,212,582 Electrostatically controlled beam steering device and method 341 1992
5,312,513 Methods of forming multiple phase light modulators 270 1992
5,172,262 Spatial light modulator and method 382 1992
5,305,640 Digital flexure beam accelerometer 185 1992
5,446,479 Multi-dimensional array video processor system 247 1992
5,818,095 High-yield spatial light modulator with light blocking layer 298 1992
5,272,473 Reduced-speckle display system 282 1992
5,327,286 Real time optical correlation system 268 1992
5,287,096 Variable luminosity display system 265 1992
5,325,116 Device for writing to and reading from optical storage media 250 1992
5,280,277 Field updated deformable mirror device 326 1992
5,506,597 Apparatus and method for image projection 279 1992
5,457,566 DMD scanner 237 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 345 1993
5,461,411 Process and architecture for digital micromirror printer 294 1993
5,323,002 Spatial light modulator based optical calibration system 270 1993
5,489,952 Method and device for multi-format television 325 1993
5,365,283 Color phase control for projection display using spatial light modulator 277 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 398 1993
5,581,272 Signal generator for controlling a spatial light modulator 192 1993
5,457,493 Digital micro-mirror based image simulation system 314 1993
5,411,769 Method of producing micromechanical devices 256 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 284 1993
5,526,051 Digital television system 258 1993
5,459,602 Micro-mechanical optical shutter 213 1993
5,452,024 DMD display system 414 1993
5,497,197 System and method for packaging data into video processor 228 1993
5,517,347 Direct view deformable mirror device 296 1993
5,583,688 Multi-level digital micromirror device 456 1993
5,448,314 Method and apparatus for sequential color imaging 403 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 270 1994
5,606,441 Multiple phase light modulation using binary addressing 215 1994
5,444,566 Optimized electronic operation of digital micromirror devices 354 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 294 1994
5,526,688 Digital flexure beam accelerometer and method 205 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 277 1994
6,061,075 Non-systolic time delay and integration printing 178 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 304 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 277 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 256 1994
5,548,301 Pixel control circuitry for spatial light modulator 246 1994
5,650,881 Support post architecture for micromechanical devices 257 1994
5,552,924 Micromechanical device having an improved beam 242 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 198 1994
5,659,374 Method of repairing defective pixels 202 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 236 1995
6,049,317 System for imaging of light-sensitive media 246 1995
5,610,438 Micro-mechanical device with non-evaporable getter 290 1995
5,515,076 Multi-dimensional array video processor system 243 1995
6,232,936 DMD Architecture to improve horizontal resolution 208 1995
5,535,047 Active yoke hidden hinge digital micromirror device 454 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 229 1995
5,619,366 Controllable surface filter 224 1995
5,551,293 Micro-machined accelerometer array with shield plane 217 1995
5,570,135 Method and device for multi-format television 221 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 270 1995
5,597,736 High-yield spatial light modulator with light blocking layer 242 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 396 1995
5,608,468 Method and device for multi-format television 243 1995
5,610,625 Monolithic spatial light modulator and memory package 181 1995
5,646,768 Support posts for micro-mechanical devices 298 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 217 1995
6,099,132 Manufacture method for micromechanical devices 204 1995
6,447,126 Support post architecture for micromechanical devices 323 1995
5,657,099 Color phase control for projection display using spatial light modulator 204 1995
5,654,741 Spatial light modulator display pointing device 188 1995
5,784,212 Method of making a support post for a micromechanical device 231 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 280 1996
5,842,088 Method of calibrating a spatial light modulator printing system 252 1997
5,808,780 Non-contacting micromechanical optical switch 227 1997
5,912,758 Bipolar reset for spatial light modulators 201 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 189 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 283 1998
6,282,010 Anti-reflective coatings for spatial light modulators 281 1999
6,323,982 Yield superstructure for digital micromirror device 259 1999
6,295,154 Optical switching apparatus 292 1999
6,147,790 Spring-ring micromechanical device 235 1999
6,038,056 Spatial light modulator having improved contrast ratio 259 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 189 2000
6,635,919 High Q-large tuning range micro-electro mechanical system (MEMS) varactor for broadband applications 116 2000
6,376,787 Microelectromechanical switch with fixed metal electrode/dielectric interface with a protective cap layer 151 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 206 2000
6,552,840 Electrostatic efficiency of micromechanical devices 232 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 207 2000
6,657,832 Mechanically assisted restoring force support for micromachined membranes 181 2001
6,778,155 Display operation with inserted block clears 177 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 215 2001
6,775,174 Memory architecture for micromirror cell 177 2001
6,625,047 Micromechanical memory element 248 2001
6,741,503 SLM display data address mapping for four bank frame buffer 177 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (33)
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6,040,937 Interferometric modulation 620 1996
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6,680,792 Interferometric modulation of radiation 499 2001
6,650,455 Photonic mems and structures 493 2001
2002/0075,555 Interferometric modulation of radiation 410 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 377 2002
6,710,908 Controlling micro-electro-mechanical cavities 335 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 439 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 272 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 284 2002
6,747,800 Optical interference type panel and the manufacturing method thereof 145 2003
6,912,022 Optical interference color display and optical interference modulator 236 2003
6,982,820 Color changeable pixel 152 2003
6,995,890 Interference display unit 125 2003
2004/0209,195 Method for fabricating an interference display unit 217 2003
6,870,654 Structure of a structure release and a method for manufacturing the same 195 2003
6,882,458 Structure of an optical interference display cell 236 2003
2004/0240,032 Interferometric modulation of radiation 301 2004
6,999,236 Optical-interference type reflective panel and method for making the same 88 2004
6,958,847 Structure of an optical interference display unit 205 2004
6,999,225 Optical interference display panel 117 2004
6,882,461 Micro electro mechanical system display cell and method for fabricating thereof 199 2004
2005/0036,095 Color-changeable pixels of an optical interference display panel 226 2004
2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 223 2004
6,952,303 Interferometric modulation pixels and manufacturing method thereof 194 2004
6,980,350 Optical interference reflective element and repairing and manufacturing methods thereof 139 2004
2005/0195,462 Interference display plate and manufacturing method thereof 234 2004
2006/0066,932 Method of selective etching using etch stop layer 69 2005
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 191 1999
6,859,218 Electronic display devices and methods 178 2000
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 205 2001
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 267 2001
2003/0202,264 Micro-mirror device 198 2002
6,747,785 MEMS-actuated color light modulator and methods 210 2002
6,666,561 Continuously variable analog micro-mirror device 225 2002
2004/0147,056 Micro-fabricated device and method of making 187 2003
6,829,132 Charge control of micro-electromechanical device 207 2003
6,811,267 Display system with nonvisible data projection 217 2003
2005/0057,442 Adjacent display of sequential sub-images 198 2003
2005/0068,583 Organizing a digital image 174 2003
2004/0212,026 MEMS device having time-varying control 175 2004
 
LUCENT TECHNOLOGIES INC. (8)
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6,351,329 Optical attenuator 108 1999
6,522,801 Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor 71 2000
2003/0138,213 Optical systems comprising curved MEMs mirrors and methods for making same 56 2002
 
CANON KABUSHIKI KAISHA (7)
5,633,652 Method for driving optical modulation device 134 1995
6,100,872 Display control method and apparatus 176 1997
2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM 1 1998
6,513,911 Micro-electromechanical device, liquid discharge head, and method of manufacture therefor 84 2000
6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 185 2001
6,822,628 Methods and systems for compensating row-to-row brightness variations of a field emission display 186 2001
6,853,129 Protected substrate structure for a field emission display device 181 2003
 
SONY CORPORATION (7)
5,355,357 Disc player and disc loading device 170 1992
6,760,146 Light modulation element, GLV device, and laser display 42 2002
7,016,099 MEMS element, GLV device, and laser display 41 2002
7,116,462 Electrostatic drive type MEMS device and manufacturing method thereof, optical MEMS device, light modulation device, GLV device, and laser display 8 2002
7,102,808 MEMS device and methods for manufacturing thereof, light modulation device, GLV device and methods for manufacturing thereof, and laser display 6 2003
6,838,304 MEMS element manufacturing method 6 2003
6,946,315 Manufacturing methods of MEMS device 4 2004
 
U.S. Philips Corporation (5)
4,403,248 Display device with deformable reflective medium 335 1981
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XEROX CORPORATION (5)
6,160,833 Blue vertical cavity surface emitting laser 200 1998
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6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 189 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 178 1999
 
EASTMAN KODAK COMPANY (4)
5,075,796 Optical article for multicolor imaging 199 1990
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FUJI PHOTO FILM CO., LTD. (4)
6,356,254 Array-type light modulating device and method of operating flat display unit 130 1999
6,327,071 Drive methods of array-type light modulation element and flat-panel display 251 1999
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MASSACHUSETTS INSTITUTE OF TECHNOLOGY (4)
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 343 1989
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5,345,328 Tandem resonator reflectance modulator 145 1992
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MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (3)
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ROBERT BOSCH GMBH (2)
5,683,591 Process for producing surface micromechanical structures 191 1995
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THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,311,360 Method and apparatus for modulating a light beam 567 1992
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THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (2)
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Techbank Corporation (1)
6,736,987 Silicon etching apparatus using XeF2 48 2000
 
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 228 1991
 
The United States of America as represented by the Secretary of the Navy (1)
4,228,437 Wideband polarization-transforming electromagnetic mirror 170 1979
 
TOPPOLY OPTOELECTRONICS CORP. (1)
5,976,902 Method of fabricating a fully self-aligned TFT-LCD 76 1998
 
VENTURE LENDING & LEASING IV, INC. (1)
2001/0040,675 Method for forming a micromechanical device 84 2001
 
Other [Check patent profile for assignment information] (9)
4,445,050 Device for conversion of light power to electric power 184 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 174 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 262 1991
5,228,013 Clock-painting device and method for indicating the time-of-day with a non-traditional, now analog artistic panel of digital electronic visual displays 133 1992
5,526,327 Spatial displacement time display 136 1994
5,500,635 Products incorporating piezoelectric material 282 1994
5,641,391 Three dimensional microfabrication by localized electrodeposition and etching 146 1995
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 238 2003
2005/0001,828 Charge control of micro-electromechanical device 175 2004

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (24)
7,630,114 Diffusion barrier layer for MEMS devices 2 2005
7,706,044 Optical interference display cell and method of making the same 8 2006
7,660,058 Methods for etching layers within a MEMS device to achieve a tapered edge 6 2006
7,580,172 MEMS device and interconnects for same 4 2006
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 3 2008
7,688,494 Electrode and interconnect materials for MEMS devices 10 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 2 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
8,115,988 System and method for micro-electromechanical operation of an interferometric modulator 0 2008
7,864,403 Post-release adjustment of interferometric modulator reflectivity 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 0 2009
8,077,379 Interferometric optical display system with broadband characteristics 0 2009
8,126,297 MEMS device fabricated on a pre-patterned substrate 0 2010
7,835,093 Methods for forming layers within a MEMS device using liftoff processes 5 2010
8,218,229 Support structure for MEMS device and methods therefor 0 2010
8,149,497 Support structure for MEMS device and methods therefor 1 2010
7,952,789 MEMS devices with multi-component sacrificial layers 4 2010
8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2010
8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same 0 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices 0 2010
8,300,299 MEMS devices with multi-component sacrificial layers 0 2011
 
QUALCOMM INCORPORATED (1)
7,709,964 Structure of a micro electro mechanical system and the manufacturing method thereof 6 2007

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