Substrate proximity processing housing and insert for generating a fluid meniscus
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United States of America Patent
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-
Nov 13, 2007
Grant Date -
Jul 7, 2005
app pub date -
Apr 1, 2004
filing date -
Sep 30, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus for generating a fluid meniscus to be formed on a surface of a substrate is provided including a housing where the housing includes a housing surface to be placed proximate to a substrate surface of the substrate. The housing further includes a process configuration receiving region that is surrounded by the housing surface. The apparatus also includes a process configuration insert which has an insert surface where the process configuration insert is defined to fit within the process configuration receiving region of the housing such that the insert surface and the housing surface define a proximity face that can be placed proximate to the substrate surface of the substrate.
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