Co-planar surface and torsion device mirror structure and method of manufacture for optical displays
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 20, 2007
Grant Date -
Dec 7, 2006
app pub date -
Jun 1, 2005
filing date -
Jun 1, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A spatial light modulator is provided. The spatial light modulator includes a first substrate comprising a plurality of electrically activated electrodes and a bias grid and a standoff structure coupled to the first substrate. The standoff structure includes a central portion projecting to a first height above the first substrate and an extension portion projecting to a second height above the first substrate, the second height being less than the first height. The spatial light modulator also includes a mirror plate comprising a central contact structure integrally formed with the central portion of the standoff structure, a torsion beam coplanar with the central contact structure and free from contact with the standoff structure, and a reflective surface coupled to the plurality of torsion arms and free from contact with the standoff structure.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully