Moveable micro-electromechanical device
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United States of America Patent
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-
Nov 27, 2007
Grant Date -
Jan 11, 2007
app pub date -
Sep 8, 2006
filing date -
Apr 8, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A MEMS device is provided. The MEMS device may include a first plate and a second plate defining a cavity with the first plate. The MEMS device may also include a first transducer configured to cause a first relative movement between the first and second plates and a second transducer configured to cause a second relative movement between the first and second plates.
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