Graphics engine for high precision lithography

United States of America Patent

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Nov 27, 2007
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Aug 28, 2003
app pub date
Sep 12, 2001
filing date
Sep 12, 2001

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Abstract

The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.

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Patent Owner	Address
MICRONIC LASER SYSTEMS AB	SWEDISH TIBBERS TABY STOCKHOLM

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G06K:RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD ....

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Inventor Name	Address	# of filed Patents	Total Citations
Elmfors, Per	Huddinge, SE	7	165
Gustavson, Stefan	Norrkoping, SE	3	108
Olsson, Martin	Linkoping, SE	13	178
Sandstrom, Torbjo	Pixbo, SE	7	101

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Graphics engine for high precision lithography

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United States of America Patent

09954721

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PATENT NO	7302111
APP PUB NO	20030160980A1
SERIAL NO	09954721
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
November 27, 2007	US,7302111,B2 US7302111B2	GRANTED PATENT AS SECOND PUBLICATION
August 28, 2003	US,20030160980,A1 US20030160980A1	FIRST PUBLISHED PATENT APPLICATION

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