Shielded probe for high-frequency testing of a device under test
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United States of America Patent
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-
Dec 4, 2007
Grant Date -
Apr 5, 2007
app pub date -
Dec 1, 2006
filing date -
May 23, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A shielded probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies. The probe may include a probe tip that extends through a dielectric substrate that supports on a first surface a signal path to test instrumentation and on a second surface a ground path that shields both the signal path and the probe tip.
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