Phase measuring method and apparatus for multi-frequency interferometry
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United States of America Patent
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Dec 4, 2007
Grant Date -
Feb 16, 2006
app pub date -
Aug 29, 2003
filing date -
Sep 2, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention provides a novel method for absolute fringe order identification in multi-wavelength interferometry based on optimum selection of the wavelengths to be used. A theoretical model of the process is described which allows the process reliability to be quantified. The methodology produces a wavelength selection which is optimum with respect to the minimum number of wavelengths required to achieve a target dynamic measurement range. Conversely, the maximum dynamic range is produced from a given number of optimally selected wavelengths utilized in a sensor. The new concept introduced for optimum wavelength selection is scalable, i.e. from a three wavelength system to a four wavelength system, from four wavelengths to five, etc.
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