Tunable optical filter with heater on a CTE-matched transparent substrate

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United States of America Patent

PATENT NO 7304799
APP PUB NO 20050105185A1
SERIAL NO

10960764

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Abstract

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An optical device including: a glass substrate; a crystalline silicon layer bonded to the glass substrate; and a thermally tunable thin-film optical filter fabricated on top of the crystalline silicon layer.

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Patent Owner(s)

Patent OwnerAddress
II-VI DELAWARE INC1100 NORTH MARKET STREET 4TH FLOOR WILMINGTON DE 19890

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cohen, Mitchell S Bedford, MA 28 774
Ma, Eugene Yi-Shan Chestnut Hill, MA 11 119

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