Optical tunable filter and method of manufacturing the same
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United States of America Patent
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Dec 4, 2007
Grant Date -
Jun 9, 2005
app pub date -
Dec 2, 2004
filing date -
Dec 3, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An optical tunable filter is provided including a first substrate having light transmission properties and having a movable part and a supporting member that movably supports the movable part and having a smaller thickness than the movable part, a second substrate having light transmission properties and opposed to the first substrate, a first gap and a second gap provided between the movable part and the second substrate, an interference part causing interference between the movable part and the second substrate through the second gap and a drive member changing an interval of the second gap by moving the movable part to the second substrate by making use of the first gap.
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