Lithographic apparatus, radiation beam inspection device, method of inspecting a beam of radiation and device manufacturing method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 11, 2007
Grant Date -
Jan 4, 2007
app pub date -
Jun 29, 2005
filing date -
Jun 29, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A lithographic apparatus having a radiation beam inspection device including a barrier to the beam of radiation, the barrier having an aperture through which a portion of the beam of radiation passes; and a radiation sensor that determines the intensity of the radiation passing through the aperture and the position, relative to the aperture, of the point at which the radiation is incident on the radiation sensor.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully