Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device
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United States of America Patent
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Dec 18, 2007
Grant Date -
Oct 16, 2003
app pub date -
Apr 9, 2003
filing date -
Apr 15, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
In this embodiment, an interval distance between a desposition source holder 17 and an object on which deposition is performed (substrate 13) is reduced to 30 cm or less, preferably 20 cm or less, more preferably 5 to 15 cm, and a deposition source holder 17 is moved in an X direction or a Y direction in accordance with an insulator (also called a bank or a barrier) in deposition, and a shutter 15 is opened or closed to form a film. The present invention can cope with an increase in size of a deposition apparatus with a further increase in size of a substrate in the future.
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