MEMS switch electrode configuration to increase signal isolation
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United States of America Patent
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Dec 18, 2007
Grant Date -
Feb 23, 2006
app pub date -
Aug 19, 2004
filing date -
Aug 19, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microelectromechanical system (MEMS) switch is provided which includes a moveable electrode with an opening arranged over at least a portion of the signal trace. In some cases, the opening may include a notch arranged along a periphery of the moveable electrode. In particular, the opening may include a notch bound by two edges of the moveable electrode which are respectively arranged relative to opposing sides of the signal trace. In other embodiments, the opening may include a hole arranged interior to the peripheral edge of the moveable electrode. In some cases, the MEMS switch may include a plurality of contact structures coupled to signal traces. In such cases, the moveable electrode may include openings specifically arranged above a plurality of the signal traces.
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