Resonator system with a plurality of individual mechanically coupled resonators and method of making same
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United States of America Patent
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Dec 25, 2007
Grant Date -
Jun 30, 2005
app pub date -
Sep 21, 2004
filing date -
Aug 6, 2002
priority date (Note) -
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Abstract
A resonator system wherein a plurality of resonators each including piezoelectric material are suspended relative to a substrate. An edge of each resonator is mechanically coupled to an edge of another resonator and the plurality of resonators expand and contract reaching resonance in response to an applied electric field.
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