Positioning apparatus, exposure apparatus, and device manufacturing method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 25, 2007
Grant Date -
Sep 21, 2006
app pub date -
Mar 17, 2006
filing date -
Mar 18, 2005
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
This invention discloses an apparatus having a base and a movable body which is driven to move along the base. The apparatus includes a generator configured to generate a driving signal for the movable body, a temperature adjusting mechanism configured to adjust temperature of the base, and a controller configured to control a manipulated variable for the temperature control mechanism based on the generated driving signal.
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