Substrate-transporting device
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United States of America Patent
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-
Jan 1, 2008
Grant Date -
Dec 15, 2005
app pub date -
Aug 10, 2004
filing date -
May 27, 2004
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention relates to a substrate-transporting device, including a base, a substrate carrier unit and a shaft unit mounted between the base and the substrate carrier unit. The shaft unit has a supporting shaft and a shaft base to support and control rotation of the substrate carrier unit. The substrate carrier unit includes a bottom carrier seat connected to the supporting shaft, a plurality of first supporting components mounted on a surface of the bottom carrier seat, a top carrier seat having a plurality of vacuum suction nozzles and a plurality of second supporting components, and at least a retractable component sandwiched between the top carrier seat and the bottom carrier seat. The top carrier seat is used to affix and detect the substrate. The retractable component is capable of adjusting the distance between the top carrier seat and the bottom carrier seat.
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